Surface Roughness Model of Ground 4H-SiC Considering Ductile and Brittle Removal
Hongyi Xiang,
Haoxiang Wang,
Renke Kang
et al.
Abstract:Surface roughness is a critical indicator to evaluate the quality of ground surfaces for 4H-SiC. Determining surface roughness experimentally is a time-consuming and laborious process, and developing a reliable model for predicting surface roughness is a key challenge in 4H-SiC grinding. However, the existing models for surface roughness in wafer rotational grinding fail to yield reasonable results because they do not adequately consider the processing parameters and material characteristics. In this study, a … Show more
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