2023
DOI: 10.1002/smtd.202301485
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Surface Roughness Effects on Confined Nanoscale Transport of Ions and Biomolecules

Chaofan Ma,
Fei Zheng,
Wei Xu
et al.

Abstract: Biological channels, especially membrane proteins, play a crucial role in metabolism, facilitating the transport of nutrients and other materials across cell membranes in a bio‐electrolyte environment. Artificial nanopores are employed to study ion and biomolecule transport behavior inside. While the non‐specific interaction between the nanopore surface and transport targets has garnered significant attention, the impact of surface roughness is overlooked. In this study, Nanopores with different levels of inne… Show more

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“…On the other side of the wafer, the silicon nitride layer and silicon oxide layer were removed using photolithography and RIE with a square of 320 μm × 320 μm. The free-standing silicon nitride membrane was obtained after removing the silicon substrate by a potassium hydroxide wet etching. …”
Section: Methodsmentioning
confidence: 99%
“…On the other side of the wafer, the silicon nitride layer and silicon oxide layer were removed using photolithography and RIE with a square of 320 μm × 320 μm. The free-standing silicon nitride membrane was obtained after removing the silicon substrate by a potassium hydroxide wet etching. …”
Section: Methodsmentioning
confidence: 99%