observed photoinduced deformations is still not fully understood, the phenomena relies on trans-cis-trans photoisomerization cycles of the azobenzene moieties, which occurs repeatedly in the case of azobenzene derivatives upon illumination in their absorption band. [9][10][11][12][13] In this case, direct and effi cient optical inscription of relief patterns can be achieved on thin azo-fi lms by a spatially modulated illumination. [14][15][16] This effect results from the photoinduced motion of the azo-molecules and the consequent mass transport of the polymeric matrix to which this molecule is grafted in the side chain. In the literature, most studies have been dedicated to organic polymers (e.g., poly(methyl methacrylate), PMMA), where the active molecule is an azobenzene derivative with a short-lifetime cis-isomer, the archetype being the Dispersed Red 1 (DR 1). In the context of researches on new innovative lithographic processes, azo-doped materials remain highly appealing, since it allows the direct maskless photopatterning of thin fi lms.An obvious drawback of azo-materials is, however, that it concerns specifi c materials, usually polymers, which exhibit a strong color (red for DR1) due to the visible absorption band of the azo-molecules. Applications are, thus, limited to those of common photoresists used as masks for selective etching of the underlying material, lift off processing, or master molds for embossing stamps. [17][18][19] Extension to other materials and possible removal of the absorbing dye after structuration remain an interesting issue that would open the way toward the direct use of photopatterned fi lms for the elaboration of diffractive gratings, or for light extraction issues, for example, in OLEDs. [ 20,21 ] Different approaches can be considered for the removal of the azo-moieties. Photobleaching has been shown to allow for a drastic decrease of the sample coloration, but a signifi cant residual absorbance usually remains in the near UV part of the visible spectrum. [ 21 ] Performing thermal treatments also allows for the degradation of the absorbing moieties. However, up to now, almost all tentative experiments to apply this method to a patterned azo-fi lm have shown a very signifi cant, if not complete, relaxation of the photoinscribed relief structure that occurs when the material discoloration is achieved. [ 22 ] In 1993, Chaput et al. extended the family of active azo-materials to hybrid sol-gel silica coatings [ 23 ] that were found to behave very similarly to the organic polymers counterparts, [ 24 ] although Azobenzene molecules are well known for their photoswitching properties. When incorporated into a polymer fi lm, push−pull azobenzene derivatives such as the DR1 (Dispersed Red 1) confer to the fi lm some remarkable photomechanical properties, allowing for the direct optical inscription of relief patterns. While mainly investigated in the case of organic polymers such as poly(methyl methacrylate) (PMMA), it was shown some years ago that similar photoinduced deformation ph...