Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Silicon Porosification: State of the Art

“…253,255,256 In particular, Kumar et al 251 have shown that, depending upon the laser power density, different etching stages can form cracks, pores, and pillar-like structures on the Si wafer. To get the porous structures, the laser power density should neither be very low nor very high.…”

Quantum confinement effects in silicon nanocrystals produced by laser-induced etching and cw laser annealing

“…The relative intensities vary with the laser power density. Low etching power densities (<5 W cm −2 ) create only a surface disorder with no nanocrystal formation [30,31]. Only a small number of electron-hole pairs are generated and no PL emission is observed.…”

Luminescent Properties of Porous Silicon

“…Analysis of the PSi layer morphology has shown that the structure of the porous layer during laser-induced etching can be controlled by the excitation laser power density, etching time, concentration of etchant, and wavelength of laser source used (Wellner et al 2000;Rasheed et al 2001;Mavi et al 2006). In particular, Kumar et al (2008) have shown that depending on the laser power density, different etching stages naming cracks, pores, and pillar-like structures can be formed on the Si wafer.…”