Surface reaction and stability of parylene N and F thin films at elevated temperatures

Wu, Peter; Yang, G.‐R.; McDonald, J. K.; Lu, Toh‐Ming

doi:10.1007/bf02659727

Cited by 31 publications

(8 citation statements)

References 10 publications

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“…Lastly, annealing was performed for 2 h at 200 °C in a vacuum oven. After annealing, the thickness of parylene encapsulating the metal patterns reduced to about 4.5 μm from 6 μm, as reported in a previous study [27]. The schematic and photographic images of the electrode array are shown in Figure 1.…”

Section: Methodssupporting

confidence: 64%

Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Jeong

Chou

Lee

et al. 2016

Sensors

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This paper investigates the effects of annealing of the electrodes based on parylene-caulked polydimethylsiloxane (pc-PDMS) in terms of mechanical strength and long-term electrical property. Previously, the electrodes based on pc-PDMS showed a better ability to withstand in vivo environments because of the low water absorption and beneficial mechanical properties of the substrate, compared to native PDMS. Moreover, annealing is expected to even strengthen the mechanical strength and lower the water absorption of the pc-PDMS substrate. To characterize the mechanical strength and water absorption of the annealed pc-PDMS, tensile tests were carried out and infrared (IR) spectra were measured using Fourier transform infrared spectroscopy over a month. The results showed that annealed pc-PDMS had higher mechanical strength and lower water absorption than non-annealed pc-PDMS. Then, electrochemical impedance spectroscopy was measured to evaluate the electrical stability of the electrodes based on annealed pc-PDMS in phosphate-buffered saline solution at 36.5 °C. The impedance magnitude of the electrodes on annealed pc-PDMS was twice higher than that of the electrodes on non-annealed pc-PDMS in the initial days, but the impedance magnitude of the electrodes based on two different substrates converged to a similar value after eight months, indicating that the annealing effects disappear after a certain period of time in a physiological environment.

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Section: Methodssupporting

confidence: 64%

Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Jeong

Chou

Lee

et al. 2016

Sensors

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“…The main reasons are the difficulty encountered in film synthesis (process, cost) and the only recent availability of commercial films (since 2004). The work reported in the literature deals mainly with film synthesis and the resulting chemical structure (CF 2 formation, crystallization kinetics, and oxygen impurity content), 8,9,[17][18][19] and sometimes with thermal properties. 11,12 In fact, studies regarding the electrical properties of PA-F are almost nonexistent.…”

Section: Introductionmentioning

confidence: 99%

Electrical Conductivity of Parylene F at High Temperature

Diaham

Bechara

Locatelli

et al. 2010

Journal of Elec Materi

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The electrical conductivity of both as-deposited and annealed poly(a,a,a¢,a¢-tetrafluoro-p-xylylene) (PA-F) films has been investigated up to 400°C. The static conductivity (r DC ) values of PA-F measured between 200°C and 340°C appear to be $2.5 orders of magnitude lower for annealed films than for as-deposited ones. This change is attributed to a strong increase in the crystallinity of the material occurring above 340°C. After annealing at 400°C in N 2 , the r DC value measured at 300°C, for instance, decreased from 3.8 9 10 À12 X À1 cm À1 to 7.5 9 10 À15 X À1 cm À1 . Physical interpretations of such an improvement are offered.

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“…[25] There are conflicting reports on changes to film thickness, [20] length and adhesion strength (interestingly with Silquest A-174 promoter, as used in the present study) of Parylenes depending on (annealing) temperature where the polymer folds into several lamellae before turning into spherulites as a consequence of transitioning from crystallization to glass transition temperatures. [29][30][31][32] It should also be noted that certain studies employed films annealed at 100 °C for up to 120 minutes, [31] much like the annealing conditions in this report. These data emphasize the need for careful optimization of the annealing time and temperature for reproducible Parylene C film fabrication.…”

Section: Remarks On Parylene C Aging Relevant To Lifetime Predictionsmentioning

confidence: 99%

Parylene C Aging Studies.

Achyuthan¹,

Sawyer²,

Mata³

et al. 2014

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Parylene C is used in a device because of its conformable deposition and other advantages. Techniques to study Parylene C aging were developed, and "lessons learned" that could be utilized for future studies are the result of this initial study. Differential Scanning Calorimetry yielded temperature ranges for Parylene C aging as well as post-deposition treatment. Post-deposition techniques are suggested to improve Parylene C performance. Sample preparation was critical to aging regimen. Short-term (~40 days) aging experiments with free standing and ceramic-supported Parylene C films highlighted "lessons learned" which stressed further investigations in order to refine sample preparation (film thickness, single sided uniform coating, machine versus laser cutting, annealing time, temperature) and testing issues ("necking") for robust accelerated aging of Parylene C.

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Surface reaction and stability of parylene N and F thin films at elevated temperatures

Cited by 31 publications

References 10 publications

Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Electrical Conductivity of Parylene F at High Temperature

Parylene C Aging Studies.

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