Surface profilometry using the incoherent self-imaging technique in reflection mode

Abstract

In this paper, we introduce a highly sensitive and cost-effective surface profilometry technique based on the Lau self-imaging phenomenon in reflection mode, combined with the Moiré technique. Standard incoherent grating imaging with two Ronchi rulings is deployed to produce localized Fresnel pseudoimages, except that the light wavefront gets modulated after reflecting off the surface under test and before the final image forms. A third grating is superimposed on the pseudoimage to take advantage of the magnification property of the Moiré fringes and enhance the surface-induced modulations. A five-step phase-shifting technique is used to extract the 2D surface profile of the sample from the recorded Moiré patterns. To demonstrate our technique, we measure the profile of a 250 nm step-like metallic sample. The results show a few nanometer uncertainties, very good reproducibility, and agreement with other known optical and mechanical surface profilometry methods.