Surface profilometry of silicon wafers using wavelength-tuned phase-shifting interferometry

Miao, Fuqing; Ahn, Seokyoung; Moon, Young Hoon; Kim, Yangjin

doi:10.1007/s12206-019-1025-3

Cited by 16 publications

(2 citation statements)

References 30 publications

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“…This paper is focused on the variable wavelength interferometry (VAWI) [1][2][3][4] based on a standard microscope. Except our approach, there are many other interferometric systems designed for measuring birefringent objects 5,6,7 or specific geometrical structurers [8][9][10][11] , and frequently they use more than one wavelength. In our technique, a monochromator delivers the light beam, wavelength of which can be scanned over the programmed spectrum in a quasi-continues manner.…”

Section: Introductionmentioning

confidence: 99%

Multispectral interferometry for characterizing nano-objects

Litwin,

Radziak,

Czyzewski

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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The paper discusses an alternative approach to the variable wavelength interferometry. The technique is based on specialized composition of two birefringent prisms that are inserted in a classical microscope with the Kӧhler illumination system. The optical system includes a continuously tuned light source and consists in advanced processing of sequentially recorded images at different wavelengths. The instrument is suitable for both transmitted and reflected-light modes and allows the user to measure optical and geometrical parameters of phase or reflective structures. This paper focuses on the reflected-light mode set-up, and measurements of waveplates and step height standards. The low uncertainty of the optical path difference is obtained by the continuous character of the light source and constitutes a key element of the system. In contrast to some previous presentations on the variable wavelength interferometry this paper demonstrates more profound nature of the phenomenon and a more precise algorithm for the fringe image processing.

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Section: Introductionmentioning

confidence: 99%

Multispectral interferometry for characterizing nano-objects

Litwin,

Radziak,

Czyzewski

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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“…The precision and accuracy are determined by selection of the algorithm implemented for fringe analysis. For suppressing coupling errors, Miao et al proposed the 8N-7 phase shifting algorithm consisting of novel polynomial window function and discrete Fourier transform [15]. This 8N-7 algorithm provided the best performance compared to the conventional phase shifting algorithms, but it required a long wavelength range and suppression of the intensity fluctuation and environmental vibrations.…”

Section: Introductionmentioning

confidence: 99%

Carré Phase Shifting Algorithm for Wavelength Scanning Interferometry

et al. 2022

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Wavelength scanning interferometry is an interferometric technique for measuring surface topography without the well-known 2π phase ambiguity limitation. The measurement accuracy and resolution of this technique depends, among other factors, on the algorithm used to evaluate its sinusoidal interference pattern. The widely used fast Fourier transform analysis experiences problems such as waviness error across the measured surface due to spectral leakage. This paper introduces a new fringe analysis method based on the Carré phase shifting algorithm combined with a least squares fitting approach. Numerical simulation was carried out to assess the performance of the Carré algorithm in comparison to fast Fourier transform analysis, and the same was validated by presenting four experimental case study examples (a surface flat, a ceramic ball bearing, a flexible thin film, and a discontinuous step height sample). The analysis results show that the proposed Carré algorithm with least squares fitting can significantly eliminate the waviness error, especially when measuring steep surfaces.

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Phase extraction formula for glass thickness measurement using Fizeau interferometer

Bae

Kim

2021

J Mech Sci Technol

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Surface profilometry of silicon wafers using wavelength-tuned phase-shifting interferometry

Cited by 16 publications

References 30 publications

Multispectral interferometry for characterizing nano-objects

Multispectral interferometry for characterizing nano-objects

Carré Phase Shifting Algorithm for Wavelength Scanning Interferometry

Phase extraction formula for glass thickness measurement using Fizeau interferometer

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