Surface profilometry by a parallel-mode confocal microscope

Chmelík, Radim; Harna, Zdenek

doi:10.1117/1.1461832

Cited by 9 publications

(6 citation statements)

References 3 publications

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“…In such applications imaging through scattering media is highly desirable feature of CCHM, which is enabled by the use of incoherent illumination. The CCHM in reflected-light mode is most frequently used for surface profiling [6,7,27], where the incoherent illumination enables a novel combined phase and depth-discriminated intensity imaging to overcome the 2π phase ambiguity [6].…”

Section: Discussionmentioning

confidence: 99%

“…Reduction of spatial coherence brings better lateral resolution (see section 4). Reduction of both, spatial and temporal coherence, allows for coherence gating [25,27,28,40], i.e. imaging through scattering media and confocal-like optical sectioning in the case of reflected-light setup.…”

Section: Influence Of Spatial and Temporal Coherence On The Imaging Pmentioning

confidence: 99%

“…The theoretical description of the imaging process of CCHM was carried out and compared to other imaging systems [25]. Time-lapse analyses of living cells [3,26] and surface profilometry measurements [6,7,27] were made using the CCHM. A novel method of combined phase and depth-discriminated intensity imaging was proposed [6].…”

Section: Introductionmentioning

confidence: 99%

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Off-axis setup taking full advantage of incoherent illumination in coherence-controlled holographic microscope

Slabý¹,

Kolman²,

Doštál³

et al. 2013

Opt. Express

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Coherence-controlled holographic microscope (CCHM) combines off-axis holography and an achromatic grating interferometer allowing for the use of light sources of arbitrary degree of temporal and spatial coherence. This results in coherence gating and strong suppression of coherent noise and parasitic interferences enabling CCHM to reach high phase measurement accuracy and imaging quality. The achievable lateral resolution reaches performance of conventional widefield microscopes, which allows resolving up to twice smaller details when compared to typical off-axis setups. Imaging characteristics can be controlled arbitrarily by coherence between two extremes: fully coherent holography and confocal-like incoherent holography. The basic setup parameters are derived and described in detail and experimental validations of imaging characteristics are demonstrated.

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Section: Discussionmentioning

confidence: 99%

Section: Influence Of Spatial and Temporal Coherence On The Imaging Pmentioning

confidence: 99%

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Off-axis setup taking full advantage of incoherent illumination in coherence-controlled holographic microscope

Slabý¹,

Kolman²,

Doštál³

et al. 2013

Opt. Express

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show abstract

“…The possibility of reconstructing the image phase provides an enhancement of the depth resolution. The image phase varies according to the equation ę = 2nkz(l + cos a) [8], the depth resolution is within the range of a few nanometers.…”

Section: Discussionmentioning

confidence: 99%

Holographic confocal microscope

Antosov

Harna

2003

SPIE Proceedings

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We have developed a new laboratory version of a reflected-light holographic confocal microscope (HCM). The confocal imaging capability with the depth discrimination have been verified by the measurement of the axial intensity response for a perfect plane mirror. The considerable improvement of axial resolution is achieved without necessity of high-NA objectives using broadband illumination. The operating principle of the mechanisms employed in a laboratory version ofthe HCM is outlined.

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“…A fast convergence of this process occurs because the non-diagonal elements s ij in the matrices dened by eqn (16) are typically much smaller than the diagonal elements R i (i.e., the interfering lines of other elements are much weaker than the analytical line of the element affected). Eqn (18) and (19), if written in a non-matrix notation, would become where x E ¼ c E,M q M . It should be noted that these calculations can be done with any number of lines (channels) for an element and if more than one line is used, the resulting x E or the concentration c E can be calculated as the average or the median over all the lines of the element E that are measured.…”

Section: Corrections For Line Interferences and The Backgroundmentioning

confidence: 99%