2011
DOI: 10.1007/s11433-010-4227-3
|View full text |Cite
|
Sign up to set email alerts
|

Surface plasmon interference pattern on the surface of a silver-clad planar waveguide as a sub-micron lithography tool

Abstract: A new sub-micron photolithography tool has been realized by utilizing the interference of surface plasmon waves (SPWs) on the near surface of a silver (Ag)-clad ultraviolet (UV) planar waveguide. A laser beam with a wavelength of 325 nm was incident into the waveguide core, and suffered a series of total internal reflections on the interfaces between the waveguide core and the cladding layers. The incident light and the reflected light induced two beams of SPWs traveling in contrary directions, which interfere… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2012
2012
2018
2018

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
references
References 18 publications
0
0
0
Order By: Relevance