2003
DOI: 10.1063/1.1613794
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Surface photovoltage spectroscopy of epitaxial structures for high electron mobility transistors

Abstract: AlGaN/GaN high electron mobility transistor, AlGaAs/InGAs/GaAs pseudomorphic HEMT, and InAlAs/InGaAs metamorphic HEMT ͑MHEMT͒ epitaxial structures have been characterized using surface photovoltage spectroscopy. The effects of the transistor top and bottom delta-doping levels ␦ top , ␦ bot , and surface charge Q sur on the spectrum features have been studied using numerical simulations. Based on the latter, an empirical model has been developed, which allows extraction and comparison of ␦ top , ␦ bot , and Q s… Show more

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Cited by 8 publications
(4 citation statements)
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“…Therefore, the formation of an SPV signal is determined by the fundamental properties of light absorption and transport of excess carriers in a semiconducting material [20][21][22][23]. It has been utilized as an extensive source of surface and bulk information on various semiconductors and semiconductors interface [24][25][26][27]. Therefore, SPS and FISPS are effective tools to investigate the influence of gas adsorption on the properties of surface charge transfer of ZnO nanoparticles.…”
mentioning
confidence: 99%
“…Therefore, the formation of an SPV signal is determined by the fundamental properties of light absorption and transport of excess carriers in a semiconducting material [20][21][22][23]. It has been utilized as an extensive source of surface and bulk information on various semiconductors and semiconductors interface [24][25][26][27]. Therefore, SPS and FISPS are effective tools to investigate the influence of gas adsorption on the properties of surface charge transfer of ZnO nanoparticles.…”
mentioning
confidence: 99%
“…In SPV spectroscopy, the change in the surface potential of a semiconductor due to redistribution of electron-hole pairs generated under optical excitation is monitored. This technique has been extensively used to characterize hetero-structures, quantum wells (QW), quantum dots, superlattices and nanostructures [2][3][4][5][6][7][8]. Several other experimental techniques such as photoluminescence spectroscopy (PL), photoluminescence excitation spectroscopy (PLE), absorption/transmission and photo-reflectance spectroscopy (PR), etc, can also give valuable information about quantum structures.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, this technique has been used to characterize heterostructures, quantum wells (QWs), quantum dots and superlattices and nano-structures [14][15][16][17]. Solodky et al [18] and Cheng et al [19] have characterized pseudomorphic high electron mobility transistors using the SPV spectroscopy technique and demonstrated its potential as a simple non-destructive technique to assess P-HEMT structures.…”
Section: Introductionmentioning
confidence: 99%