Surface passivation of silicon substrate by ternary GaxCeyOz layers grown via combination of forming gas and oxygen at different temperatures

Kammutty Musliyarakath, Abdul Shekkeer; Cheong, Kuan Yew; Quah, Hock Jin

doi:10.1016/j.ceramint.2024.04.287

Ceramics International

2024

DOI: 10.1016/j.ceramint.2024.04.287

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Surface passivation of silicon substrate by ternary GaxCeyOz layers grown via combination of forming gas and oxygen at different temperatures

Abdul Shekkeer Kammutty Musliyarakath,

Kuan Yew Cheong,

Hock Jin Quah

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Surface passivation of silicon substrate by ternary GaxCeyOz layers grown via combination of forming gas and oxygen at different temperatures

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References 92 publications

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