2018
DOI: 10.1021/acsanm.8b00816
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Surface Passivated Zinc Oxide (ZnO) Nanorods by Atomic Layer Deposition of Ultrathin ZnO Layers for Energy Device Applications

Abstract: Chemically stoichiometric and electrically lowresistive high-quality zinc oxide (ZnO) nanostructures have been developed by surface passivation with atomic layer deposited ZnO layers. The impacts of homogeneous ZnO layer growth and its thickness on the physical properties ZnO nanorods were investigated. Vertically aligned ZnO nanorod structures were synthesized by two-step process, and the surface passivation was performed by atomic layer deposition ZnO at low temperatures. Surface passivated ZnO nanorods exhi… Show more

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Cited by 29 publications
(8 citation statements)
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References 60 publications
(82 reference statements)
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“…1d) probably due to the structural disorders and the deterioration in the crystallinity of the implanted NRs. 55,56 The average crystallite size ( D ) as calculated from the well-known Debye–Scherrer's formula, 57 D = 0.94 λ / β cos θ , where λ and β are the wavelength of CuKα X-rays and the FWHM of the (002) peak, respectively, decreases with an increase in the fluence, as shown in Fig. 1d, which is at par with the previously reported results.…”
Section: Resultssupporting
confidence: 79%
“…1d) probably due to the structural disorders and the deterioration in the crystallinity of the implanted NRs. 55,56 The average crystallite size ( D ) as calculated from the well-known Debye–Scherrer's formula, 57 D = 0.94 λ / β cos θ , where λ and β are the wavelength of CuKα X-rays and the FWHM of the (002) peak, respectively, decreases with an increase in the fluence, as shown in Fig. 1d, which is at par with the previously reported results.…”
Section: Resultssupporting
confidence: 79%
“…Besides, the surface passivation of ZnO can be achieved by the plasma magnetron sputtering technique, resulting in an improvement in the crystallinity, stability, and electrocatalytic properties. 51 All in all, the chemical stability of the two electrodes is excellent. The yields of H 2 and O 2 show that the overall water splitting process exhibits almost 100% faradic efficiency at 10 mA cm −2 for 60 min, as shown in Figure S25 in the SI.…”
Section: Resultsmentioning
confidence: 96%
“…ZnO can be stabilized due to the electron transfer in the heterostructure. Besides, the surface passivation of ZnO can be achieved by the plasma magnetron sputtering technique, resulting in an improvement in the crystallinity, stability, and electrocatalytic properties . All in all, the chemical stability of the two electrodes is excellent.…”
Section: Resultsmentioning
confidence: 99%
“…Одним из подходов пассивации поверхностных дефектов наностержней ZnO является нанесение на ZnO тонких прослоек других материалов [21,22]. Часто для пассивации поверхностных дефектов ZnO наносят тонкие туннельно-прозрачные диэлектрические слои оксида алюминия Al 2 O 3 [23][24][25], которые широко применяются для пассивации поверхности кремния [26][27][28]. Методом конформного и прецизионного покрытия объектов оксидом алюминия является атомно-слоевое осаждение (ALD) [29].…”
Section: Introductionunclassified