Surface nanostructuring of hard brittle materials

Yan, Jiwang; Takayama, Nozomi

doi:10.1016/b978-0-12-816709-0.00013-6

Cited by 4 publications

(5 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, FIB is time‐consuming, especially when one tries to minimize ion‐beam damage by slowing down the milling rate. [ 146 ] Therefore, much work is needed for the FIB method to be practical for the mass production of MHP lasers.…”

Section: Optical Cavity For Metal‐halide Perovskite (Mhp) Lasersmentioning

confidence: 99%

Metal‐Halide Perovskite Lasers: Cavity Formation and Emission Characteristics

et al. 2023

View full text Add to dashboard Cite

Hybrid metal‐halide perovskites (MHPs) have shown remarkable optoelectronic properties as well as facile and cost‐effective processability. With the success of MHP solar cells and light‐emitting diodes, MHPs have also exhibited great potential as gain media for on‐chip lasers. However, to date, stable operation of optically pumped MHP lasers and electrically driven MHP lasers—an essential requirement for MHP laser's insertion into chip‐scale photonic integrated circuits—is not yet demonstrated. The main obstacles include the instability of MHPs in the atmosphere, rudimentary MHP laser cavity patterning methods, and insufficient understanding of emission mechanisms in MHP materials and cavities. This review aims to provide a detailed overview of different strategies to improve the intrinsic properties of MHPs in the atmosphere and to establish an optimal MHP cavity patterning method. In addition, this review discusses different emission mechanisms in MHP materials and cavities and how to distinguish them.

show abstract

Section: Optical Cavity For Metal‐halide Perovskite (Mhp) Lasersmentioning

confidence: 99%

Metal‐Halide Perovskite Lasers: Cavity Formation and Emission Characteristics

et al. 2023

View full text Add to dashboard Cite

show abstract

“…Since the size of the laser spot is larger than the heat propagation depth during the nanosecond green laser action time, the plate can be regarded as a semi-infinite object according to the onedimensional heat conduction problem approximately. As mentioned in the introduction, for heat conduction, the following equation can be used [40,41]:…”

Section: Principles Of Laser Cleaning Assisted By Airflowmentioning

confidence: 99%

Study on the Surface Morphology of Micro-Particles and the Oxide Layer on Silicon Carbide Crystal Using Nanosecond Green Laser Cleaning Assisted with Airflow

Xiao

Zhang

et al. 2022

Crystals

View full text Add to dashboard Cite

With a focus on the particle pollutants on the surface of silicon carbide crystal materials, this paper establishes a laser cleaning model for the fine particles found in silicon carbide crystal materials and proposes a new nanosecond green laser cleaning method assisted by airflow, which can effectively remove microparticles and the oxide layer on the substrate surface. Abaqus software and ANSYS Fluent software were used to simulate changes in the cleaning temperature field and the distribution of particles and dust during cleaning simulation, respectively. Based on the experimental research, and by using a nanosecond green laser to produce a wavelength of 532 nm, the direct irradiation of a nanosecond green laser on the surface of the element, and the particle contaminants on the surface of the silicon carbide material, optimized the process parameters to achieve a better cleaning efficiency. A green laser was used as a light source to conduct experiments to control the wind force of the gas chamber. The influence of the laser energy, scanning speed, and other parameters on the final cleaning efficiency was studied. The parameters of the silicon carbide before and after cleaning were characterized. The research shows that laser cleaning assisted with airflow is an efficient cleaning method that can be used to clean microparticles without damaging silicon carbide crystal substrate and to reduce the surface roughness of silicon carbide material from 1.63 to 0.34 μm, with an airflow of 0.2 Mpa.

show abstract

“…A comparison of these nanofabrication techniques is shown in Table 1. [11], and 58 nm/min [12] against different resists Slow 0.05 µm 3 /s in FIB deposition [13] Fast 15 wafers/h per imprint station [14] See Table 2 The biggest advantage of EBL and FIB is that they can pattern nanostructures with feature size in sub-5 nm and can process a wide range of materials, such as metals [8], alloys [15], hard and brittle ceramics and semiconductors [13], and polymers [16], making them extremely suitable techniques to process nanostructures with high precision [17]. However, the processing environment is harsh and requires vacuum operation.…”

Section: Introductionmentioning

confidence: 99%

“…FIB is similar to EBL in the limitation of processing speeds. For example, the FIB deposition rate can reach a maximum of up to 0.05 µm 3 /s [13]. The processing speed of EBL is dependent on the type of electron beam resist.…”

Section: Introductionmentioning

confidence: 99%

Scanning Probe Lithography: State-of-the-Art and Future Perspectives

et al. 2022

View full text Add to dashboard Cite

High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.

show abstract

Surface nanostructuring of hard brittle materials

Cited by 4 publications

References 27 publications

Metal‐Halide Perovskite Lasers: Cavity Formation and Emission Characteristics

Metal‐Halide Perovskite Lasers: Cavity Formation and Emission Characteristics

Study on the Surface Morphology of Micro-Particles and the Oxide Layer on Silicon Carbide Crystal Using Nanosecond Green Laser Cleaning Assisted with Airflow

Scanning Probe Lithography: State-of-the-Art and Future Perspectives

Contact Info

Product

Resources

About