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2022
DOI: 10.1002/ppap.202200068
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Surface modification of recycled polymers in comparison to virgin polymers using Ar/O2 plasma etching

Abstract: Low-pressure plasma etching of a recycled polyethylene terephthalate (PET) film is studied in comparison to virgin PET and polypropylene (PP) using a capacitively coupled radio frequency (RF) plasma reactor. Recycled polymers are distinguished by increased impurity content and weakened mechanical properties, both affecting plasma etching and adhesion processes. Mild plasma

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citations
Cited by 8 publications
(6 citation statements)
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References 49 publications
(70 reference statements)
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“…As shown in Figure 7a, the etching rate increases from 200 nm/min to 600 nm/min when the ion energy is increased from 30 eV to 200 eV [130] . Similar trends are observed with PET films exposed to Ar-O2 plasma, where higher ion energies not only improve etching, but result also in a heater load of the substrate [75] .…”
Section: Etching Ratesupporting
confidence: 78%
See 1 more Smart Citation
“…As shown in Figure 7a, the etching rate increases from 200 nm/min to 600 nm/min when the ion energy is increased from 30 eV to 200 eV [130] . Similar trends are observed with PET films exposed to Ar-O2 plasma, where higher ion energies not only improve etching, but result also in a heater load of the substrate [75] .…”
Section: Etching Ratesupporting
confidence: 78%
“…The sheath oscillates with the RF cycle, expanding and contracting, which modulates the energy of the ions impacting the electrode and consequently affecting etching or deposition rates. Given the selection of suitable process gases and conditions, RF-CCP exhibits versatility in applications, ranging from surface modification to thin film growth [75,76] .…”
Section: Radio Frequency (Rf) Plasma Devicesmentioning
confidence: 99%
“…However, the plasma activation and plasma thin film deposition on such complex polymeric substrates has been rarely addressed. [ 93,94 ] Future research should consider the interaction between such complex polymer surfaces with activating and polymerizing plasmas, as well as the migration processes of contaminants in the system consisting of plastic, the PECVD layer and a foodstuff. It is likely that, especially for such substrates, the combined plasma and surface analytical approach is imperative.…”
Section: Outlook/perspectivesmentioning
confidence: 99%
“…Atmospheric pressure plasma jet (APPJ), especially for microwave plasma jet, has a low working temperature, contains rich active particles, small ozone, and NO 2 emission and attracts great interest in wound healing, sterilization and disinfection, surface modification, and sewage purification. [1][2][3][4][5][6][7][8][9][10][11][12] Monoatomic gases, He and Ar, are often selected as the discharge working gas to generate APPJ, because the ionization efficiency of polyatomic gas is low. Many studies have been conducted on the discharge characteristics of APPJ produced by He and Ar.…”
Section: Introductionmentioning
confidence: 99%