Surface modeling and influencing factors for microlens array by slow tool servo machining

Sun, Yazhou; He, Zhicheng; Cong, Fengyu; Xie, Zhenwei; Zhang, Bohan; Liu, Haitao

doi:10.1016/j.jmapro.2023.07.037

Cited by 3 publications

(1 citation statement)

References 11 publications

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“…Among various infrared-transparent materials such as germanium, silicon, oxide glasses, and chalcogenide glasses (ChGs), ChG exhibit exceptional infrared transmittance, ultrawide infrared transmission range, extremely high linear refractive indices, low thermo-optic coefficients, and low vibrational phonon energies. − In contrast, germanium is rare and expensive, silicon is challenging to process with high costs, and oxide glasses suffer from strong infrared absorption and limited transmission bands. − Therefore, ChG is an ideal material for manufacturing MLAs. Several methods are commonly employed to fabricate MLAs, including femtosecond laser processing, − ultraprecision machining, − thermal reflow, , and precision glass molding (PGM). , Among these methods, PGM stands out as a promising technique for mass-producing ChG MLAs due to its high efficiency, high precision and suitability for processing glass materials.…”

Section: Introductionmentioning

confidence: 99%

Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays

Wang,

Zhou,

Sun

et al. 2024

ACS Appl. Mater. Interfaces

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Microlens arrays (MLAs) with a large number of units, known as massive unit microlens arrays (MUMLAs), are increasingly sought after for their ability to achieve high-power conversion in infrared optical systems. Precision glass molding (PGM) is considered the ideal manufacturing method for MUMLAs. However, the stress distribution and deformation behavior during molding lack detailed understanding, resulting in poor filling consistency and forming accuracy. Consequently, this leads to inconsistent diffuse spot size and irradiance in MUMLAs. This study aims to comprehensively analyze the glass filling behavior during the molding process of MUMLAs using both simulation and experimental approaches. It explains the impact of glass filling behavior and consistency on the optical performance of MUMLAs. Additionally, the effects of molding parameters on the filling consistency of the lenses are investigated. By optimizing these parameters, a high-consistency 128 × 128 MUMLA is fabricated.

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