Surface metrology system based on bidirectional microdisplays

Großmann, Constanze; Perske, Franziska; Zwick, Susanne; Baumgarten, Judith; Richter, B.; Riehemann, S.; Vogel, Uwe; Notni, Gunther; Tünnermann, Andreas

doi:10.1117/12.896790

Cited by 4 publications

(5 citation statements)

References 11 publications

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“…Further information can be found in. 9,11,18 projection lens Path Imaging path Measurement Imaging lens field Figure 3. Paraxial lens design of the system simulation of an 3-D sensor system.…”

Section: Bi-directional Oled Microdisplaymentioning

confidence: 99%

“…First applications which are based on a similar working BiMiD are a flow-, color-, and reflex sensor which are presented in Reckziegel et.al. 8 A further metrology application of a distance and inclination sensor is mentioned in Grossmann et al 11 Another application based on a BiMiD which works in different wavelength ranges for the OLED imaging and photo diode detection is a HMD which is mentioned in Richter et al 9 In this contribution we present a system simulation of a highly integrated compact surface metrology sensor based on bi-directional OLED microdisplay. The 3-D metrology system is based on fringe projection onto the surface of the measurement object.…”

Section: Introductionmentioning

confidence: 98%

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3D metrology system based on a bi-directional OLED microdisplay

et al. 2012

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Expanding demands on manufacturing technology increase the requirements on necessary non-contact metrology. Several optical metrology systems are based on separated imaging (e.g. camera unit) and image generating units (e.g. projection unit). This fact limits the geometrical miniaturization of the system. We present a compact, highly integrated 3-D metrology system based on the fringe projection principle using a bi-directional OLED microdisplay. The microdisplay combines light emitting pixels based on OLED technology (projection unit) and light detecting pixels based on photo diode technology (camera unit) on one single device, realized by the OLED-on-CMOS-technology. This technology provides the opportunity for a further miniaturization of optical metrology systems. The 3-D metrology system is based on fringe projection onto the surface of the measurement object. The fringes will appear deformed when observed from a dierent angle (triangulation angle). From the deformation of the fringes the 3-D coordinates of all visible points can be calculated and thus the object shape can be determined. For the application of an 3-D Sensor and due an internal display eect, separate lenses for projection and imaging are necessary. The system principle and several optical system congurations are discussed. Due to the application of the bi-directional OLED microdisplay the fringe generating elements and the detectors will be combined into one single device. Based on this integrated device an ultra-compact and solid system concept for 3-D surface metrology is practicable

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Section: Bi-directional Oled Microdisplaymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

3D metrology system based on a bi-directional OLED microdisplay

et al. 2012

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“…Further information can be found in. 9,11,15 With this device, either simultaneous or sequential emission (OLED projection) and detection (photo diode) can be realized. 15 Futher, there are two different kind of BiMiDs.…”

Section: Bi-directional Oled Microdisplaymentioning

confidence: 99%

“…First applications which are based on a similar working bi-directional OLED sensor are a flow-, color-, and reflex sensor which presented in Reckziegel et.al. 8 A further metrology application of a distance and inclination sensor is mentioned in Grossmann et al 11 Another application based on a BiMiD which works in different wavelength ranges for the OLED imaging and photo diode detection is a HMD presented by in Richter et al 9 and Herold. 12 This system can be used in the automotive, engineering and multimedia sector.…”

Section: Introductionmentioning

confidence: 98%

Optical system designs based on bi-directional sensor devices

et al. 2012

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Small and compact optical system designs are needed in nearly all application scenarios of optical projection and imaging systems, e.g. automotive, metrology, medical or multimedia. Most active optical systems are based on separated imaging (e.g. camera unit) and image generating units (e.g. projection unit). This fact limits the geometrical miniaturization of the system. We present compact optical system designs using the new technology of bi-directional sensor devices. These devices combine light emitting and light detecting elements on one single chip. The application of such innovative opto-electronic devices -so-called bi-directional OLED microdisplays (BiMiDs) -offer a huge potential for miniaturization with a simultaneous increase of performance due to a new integration step. For these new bi-directional sensor devices new optical design concepts for simultaneous and sequential emission and detection are necessary. Because the simultaneous emission and detection can disturb the functionality of the optical system. New concepts has to be applied. A first concept is an exemplary 3-D metrology system applying fringe projection. A second concept is a pico-projection system with an integrated camera function. For both concepts the system configurations and the optical design are discussed. Due to the application of the bi-directional sensor device ultra-compact systems are presented.

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“…OLED microdisplays are actually state of the art and are used in a wide range of applications, e.g. multimedia, medical and metrology applications [1- 3,7].…”

Section: Introductionmentioning

confidence: 99%

18.3: 3‐D Metrology System based on a Bi‐directional OLED Microdisplay

Großmann

Gawronski

Breitbarth

et al. 2012

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Bi-directional OLED based microdisplays offer interesting possibilities for new applications. Light emission and detection is included in one chip by using OLED-on-CMOS-technology. Such device has been primary made for optocouplers or photoelectric barriers, but it offers interesting possibilities for other application fields, e.g. multimedia and metrology. A new optical concept of a 3-D metrology sensor based on bi-directional OLED microdisplay will be presented.

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Surface metrology system based on bidirectional microdisplays

Cited by 4 publications

References 11 publications

3D metrology system based on a bi-directional OLED microdisplay

3D metrology system based on a bi-directional OLED microdisplay

Optical system designs based on bi-directional sensor devices

18.3: 3‐D Metrology System based on a Bi‐directional OLED Microdisplay

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