Surface measurement through transparent medium using Linnik type white-light spectral interferometer

Guo, Tong; Weng, Qianwen; Chen, Zhuo; Fu, Xing; Hu, Xiaotang

doi:10.1117/12.2500066

Search citation statements

Order By: Relevance

Paper Sections

Select...

Introduction1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2023

Publication Types

Select...

Article1

Relationship

Self Cite1

Independent0

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, a linear slide and a rotation stage are regularly used to drive the specimen or optical sensor to obtain their three-dimensional surface information [8,9]. Commonly used optical measurement methods include white light interferometry [10], focus variation measurement [11],…”

Section: Introductionmentioning

confidence: 99%

Curved surface measurement method using chromatic confocal sensor and tilt scanning

Wan¹,

Guo²,

Wu³

et al. 2023

Surf. Topogr.: Metrol. Prop.

Self Cite

View full text Add to dashboard Cite

Large measurement ranges and curvature changes are characteristics of curved surfaces, making it difficult to measure their topography. In this study, a four-axis measurement system is developed, and a tilt scanning measurement method using a chromatic confocal sensor is proposed to measure curved surfaces. The measurement area is divided into different parts, in which the tilt scanning measurement is performed with different angles of the chromatic confocal sensor. After the scanning, the complete measurement data are restored by data processing and stitching. Compared with conventional scanning methods, the proposed method expands the range of measurement. Finally, the effectiveness of the developed measurement system and the tilt scanning measurement method is clearly verified by measuring a spherical specimen with a radius of 50 mm.

show abstract