Surface measurement of axicon lens based on polarization phase-shifting interferometry

Wei, Zhangfan; Zeng, Aijun; Qiao, Yingjie; Hu, Jingpei; Huang, Huijie

doi:10.1117/12.2501224

Optical Metrology and Inspection for Industrial Applications V 2018

DOI: 10.1117/12.2501224

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Surface measurement of axicon lens based on polarization phase-shifting interferometry

Zhangfan Wei¹,

Aijun Zeng²,

Yingjie Qiao³

et al.

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Surface measurement of axicon lens based on polarization phase-shifting interferometry

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References 10 publications

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