Surface measurement and evaluation of large-aperture continuous phase plates

Shenglin, 温圣林 Wen; Qikai, 石琦凯 Shi; Hao, 颜浩 Yan; Yuanhang, 张远航 Zhang; Chunlin, 杨春林 Yang; Jian, 王健 Wang

doi:10.3788/hplpb20122410.2296

Cited by 4 publications

(1 citation statement)

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“…The surface shape residual error is generally not more than tens of nanometers [8,9]. Therefore, how to use chemical processing technology to achieve high damage threshold and ensure the surface accuracy of the element is the key to whether the chemical processing process of the phase element can be realized [10][11][12]. Through the change of the parameters of the fused silica sample during the chemical treatment process, such as the control of the etching depth, and the process verification and strict control measures in the cleaning process [12][13][14], the surface accuracy of the component is guaranteed to be slightly changed while the damage threshold of the phase component is increased.…”

Section: Introductionmentioning

confidence: 99%

The influence of chemical etching on the surface quality of phase components

Yuan,

Zhong,

Liu

et al. 2023

J. Phys.: Conf. Ser.

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Large-aperture fused silica phase optical components such as continuous phase plate (CPP) are widely used in large-scale laser devices to achieve beam homogenization and improve beam quality. However, under the action of high-energy lasers, their lower damage threshold seriously restricts their service life and increases cost of using. Compared with other fused silica components, chemical processing technology with hydrofluoric acid solution (HF) is lacking in the processing of phase components because the residual root mean square value (RMS) of phase elements is very high, and it can not guarantee this. Therefore, it is necessary to carry out research on the influence of chemical treatment on phase components. In this paper, we improved the chemical treatment process to achieve the change of residual RMS value not more than 3 nm, and improved the ability of resisting laser damage that the damage threshold of 29J/cm2 was obtained under the test conditions 351nm@3ns. Finally, we successfully mastered the chemical control process of phase components and applied it to the CPPs as other fused quartz materials engineering production process.

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Section: Introductionmentioning

confidence: 99%

The influence of chemical etching on the surface quality of phase components

Yuan,

Zhong,

Liu

et al. 2023

J. Phys.: Conf. Ser.

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Wavefront measurement techniques used in high power lasers

Wang

Liu

et al. 2014

High Pow Laser Sci Eng

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Key technology of vector removal decoupling in a slope-based figuring model and application in continuous phase plate fabrication

Gao,

Wang,

Zhang

et al. 2024

Appl. Opt.

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For the high-precision fabrication of a continuous phase plate (CPP), a combined decoupling algorithm of single-step decoupling based on the Clairaut–Schwarz theorem and global decoupling by stagewise iteration is proposed. It attempts to address the problem of the low accuracy and limitation of the existing slope-based figuring (SF) model in two-dimensional applications caused by the vector removal coupling between the tool slope influence function and the material removal slope due to the inherent convolution effect in the SF model. The shortcomings of CPP interferometry and the application bottleneck of the Hartmann test in traditional height-based figuring model are studied. The generation mechanism of vector removal coupling is analyzed and compensated. A CPP of 85mm×85mm was successfully machined by the decoupled slope-based figuring model, and the root mean square (RMS) of the surface height error accounted for 6.01% of the RMS of the design value. The research results can effectively improve the convergence and certainty of CPP fabrication using the slope-based figuring model.

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Surface measurement and evaluation of large-aperture continuous phase plates

Cited by 4 publications

References 0 publications

The influence of chemical etching on the surface quality of phase components

The influence of chemical etching on the surface quality of phase components

Wavefront measurement techniques used in high power lasers

Key technology of vector removal decoupling in a slope-based figuring model and application in continuous phase plate fabrication

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