“…The composition and structure of solids are analyzed by using different techniques such as Secondary Ion Mass Spectrometry (SIMS), Focused Ion Beam (FIB) electron microscopy, Rutherford Back Scattering (RBS), Elastic Recoil Detection (ERD) analysis, etc. In these techniques noble-gas ions (He + , Ne + , Ar + , Kr + , Xe + ) have been extensively used for the bombardment of solid surfaces [4][5][6][7].…”