Surface hydroxylation of poly(vinylidene fluoride) (PVDF) film

Marchand‐Brynaert, Jacqueline; Jongen, Nathalie; Dewez, Jean‐Luc

doi:10.1002/(sici)1099-0518(199705)35:7<1227::aid-pola8>3.0.co;2-z

Cited by 57 publications

(36 citation statements)

References 7 publications

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“…Surface modification has been achieved by low-energy ion beams; 2,3 argon plasma; 4 water-vapor plasma; 5 remote-hydrogen plasma; 6,7 oxygen plasma; 8 filament-assisted watervapor modification; 9,10 strong bases, such as KOH and LiOH; 11,12 solution-borne reducing agents, such as benzoin dianion/DMSO and NaBH 4 ; 13,14 and solvated electrons. 15,16 Further, a book and a review article discuss the surface modification of polymeric surfaces via plasmas.…”

Section: Introductionsupporting

confidence: 54%

Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

Senkevich

Wang

Fortin

et al. 2003

Journal of Elec Materi

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A driving force in the semiconductor industry has been the reduction in feature size to increase the speed and functionality per unit area. As the minimum feature size has been reduced to the submicron regime, the benefit of further reduction of device size will be increasingly offset by the interconnect or resistance capacitance (RC) delay. 1 With the intensified search for ultra-low dielectric-constant materials ( < 2.2), fluorination of polymeric materials is an option to reduce the dielectric constant of hydrocarbon polymers while still retaining a dense dielectric. To be compatible with copper-damascene processing, the low-interlayer dielectric (ILD) must possess a robust interface with copper-diffusion barriers, adhesion layers, or dielectric liners, depending on the back end of the line-metallization scheme. The presence of fluorine in the ILD, however, presents reliability concerns as any fluorine instability might seriously undermine diffusion/adhesion liners and copper wires. The present work investigates the stability of two fluorinated-parylene polymers before and after oxygen reactive-ion etching (RIE) in contact with Al, Al 2 O 3 , and TaN X overlayers. It is important to understand the chemical interaction between the fluorinated ILD and the barrier overlayer because trench formation in Cu-damascene architecture could be undertaken via oxygen RIE of the ILD.With the primary goal to improve adhesion, numerous research papers have devoted attention to the interface between metal films and surfacemodified fluoropolymers. Surface modification has been achieved by low-energy ion beams; 2,3 argon plasma; 4 water-vapor plasma; 5 remote-hydrogen plasma; 6,7 oxygen plasma; 8 filament-assisted watervapor modification; 9,10 strong bases, such as KOH and LiOH; 11,12 solution-borne reducing agents, such as benzoin dianion/DMSO and NaBH 4 ; 13,14 and solvated electrons. 15,16 Further, a book and a review article discuss the surface modification of polymeric surfaces via plasmas. 17,18 However, it is the particular interest here to study how fluorocarbons interact with oxidizing plasmas.There are two components of a typical plasma that can damage or etch a polymeric surface, the The fluorine stability of two parylenes, aliphatic-fluorinated AF-4 (␣, ␣, ␣Ј, ␣Ј poly(p-tetrafluoroxylylene) and aromatic-fluorinated VT-4 (2, 3, 5, 6 poly(p-tetrafluoroxylylene), were investigated underneath Al, Al 2 O 3 , and TaN X overlayers with and without exposure to oxygen reactive-ion etching (RIE). No fluorine diffusion was observed for Al films deposited onto the as-received parylenes. However, after oxygen RIE, x-ray photoelectron spectroscopy (XPS) depth profiling detected fluorine diffusion throughout Al and to a lesser extent Al 2 O 3 but in contrast to Ta 2.67 N. Metal-fluoride bonding was evident at the metal/parylene interface for all the overlayers after the parylene was exposed to oxygen RIE and annealed.

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Section: Introductionsupporting

confidence: 54%

Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

Senkevich

Wang

Fortin

et al. 2003

Journal of Elec Materi

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“…The coloration is due to defluorination for PVdF in NaOH solution. 124,125 Clearly, the worse condition of the NaOH-added slurry is similar to the case of NaNi 0.5 Mn 0.5 O 2 as seen in Figs. 12b and 12f.…”

Section: O3-type Layered Oxidesmentioning

confidence: 99%

Review—Practical Issues and Future Perspective for Na-Ion Batteries

Kubota

Komaba

2015

J. Electrochem. Soc.

631

536

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Research on electrochemical Na intercalation in battery system has been reported since the early 1980s but Na-ion batteries are not commercialized so far though studies on Li-ion batteries have been reported since the late 1970s and the practical batteries have been extensively utilized for portable device applications in the world since 1991. Now, targeted application of research and development for rechargeable batteries has changed toward realization of the sustainable energy society. With the change in social situation and development of the battery technology, studies on Na-ion batteries have been attracted significant interests since 2010. Although research interests of the electrode materials for Na-ion batteries are evoked in many researchers, advantages, disadvantages, and issues are not fully discussed for realizing the commercialization of Na-ion batteries. In this article, practical issues and perspective are reviewed on the basis of mainly our experimental experiences, know-how, and results, and the future direction is proposed to overcome the issues and to challenge the advanced performance. Power storage technology has been dramatically developed since rechargeable lithium battery (LIB), which are often called a Li-ion battery as named by Sony Corp., was commercialized in 1991 and delivered great impact on economy with tapping into new markets. A high-energy powerful LIB for portable electronic devices such as lap top computers and mobile phones is one of the best examples, and indeed they become essential tools for our life. Thanks for the great research achievement, the price of the battery pack has been declining for more than 20 years, and LIBs are now able to be installed in power system for hybrid electric vehicles (HEV) and battery electric vehicles (BEV) with relatively affordable price. Continuous effort has been devoted on the development of LIBs toward higher-power/higherenergy performance, and they now become promising candidates for being a part of grid-scale energy storage incorporated with wind and solar power systems. When it comes to large-scale power system more than that for electric vehicles, the priority in research is shifted to production cost from performance and thus minor-metal free or low-cost materials that can be derived from more abundant resources have become increasingly desirable. Although LiMn 2 O 4 , LiFePO 4 , and LiNi x Mn y Co z O 2, which are utilized in HEV and BEV instead of costly LiCoO 2, are recognized as low cost materials, 1,2 lithium in the Earth's crust is unevenly distributed as minor-metal and consequently affecting to dependence on import of lithium resource and additionally to product costs. In contrast to lithium, sodium is unlimited in the Earth's crust and sea, and is one of the most abundant elements in the Earth's crust. Since the alternative to lithium is more desirable for realizing largescale power source and sodium is the second lightest alkali next to lithium, Na-ion batteries (NIBs) have attracted much attention as feasible technology ...

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“…Hydroxylated PVDF was prepared as previously procedure [18][19][20][21]. Briefly, the PVDF powder was suspended in the aqueous solution of potassium hydroxide (0.5 M) and potassium permanganate (1.0%).…”

Section: Hydroxylation Of Pvdfmentioning

confidence: 99%

“…Scheme 1 shows the possible chemical reactions caused by treatment of the PVDF polymer with alkaline solution [18][19][20]. This alkaline treatment of the PVDF polymer shows great tolerance for a wide variety of functional groups including carbonyl, carbon-carbon double bond, epoxy and hydroxyl.…”

Section: Synthesis and Characterization Of (Pvdf-g-pamps) And Pmma-comentioning

confidence: 99%

“…This alkaline treatment of the PVDF polymer shows great tolerance for a wide variety of functional groups including carbonyl, carbon-carbon double bond, epoxy and hydroxyl. For hydroxylated PVDF sample (PVDF-OH in Fig.5), the alkaline treatment of PVDF leads to the appearance of new peak at 1,604 cm -1 which can be attributed to the carbon-carbon double bond unsymmetrical stretching vibrations [18][19][20]. Furthermore, weak signal of the hydroxyl groups was appeared at around 3,445 cm -1 [18][19][20].…”

Section: Synthesis and Characterization Of (Pvdf-g-pamps) And Pmma-comentioning

confidence: 99%

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Preparation, characterization and properties of PVDF-g-PAMPS/PMMA- co -PAMPS/silica nanoparticle as a new proton exchange nanocomposite membrane

Ahmadian‐Alam

Kheirmand

Mahdavi

2016

Chemical Engineering Journal

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Surface hydroxylation of poly(vinylidene fluoride) (PVDF) film

Cited by 57 publications

References 7 publications

Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

Stability of fluorinated parylenes to oxygen reactive-ion etching under aluminum, aluminum oxide, and tantalum nitride overlayers

Review—Practical Issues and Future Perspective for Na-Ion Batteries

Preparation, characterization and properties of PVDF-g-PAMPS/PMMA- co -PAMPS/silica nanoparticle as a new proton exchange nanocomposite membrane

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