Surface Evaluation of HSQ Containing PDMS Additive after Room-temperature Nanoimprinting

Sugano, Norihiro; Okada, Makoto; Haruyama, Yuichi; Matsui, Shinji

doi:10.2494/photopolymer.28.551

Cited by 1 publication

(1 citation statement)

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“…Our asymmetric FP cavity consists of a UV-curable resin sandwiched between two silver metal layers, and represents various colors depending on the thickness of the resin layer. Nanoimprint lithography is one of the most promising lithographic technologies, because it can generate patterns with a high resolution of 10 nm over a large area with high productivity at a low cost [21][22][23][24][25][26][27][28][29][30][31]. UV-assisted imprint lithography is a type of soft nanoimprint lithography.…”

Section: Introductionmentioning

confidence: 99%

Solution-processable multi-color printing using UV nanoimprint lithography

et al. 2020

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Recently, coloring based on nanostructure-light interaction has attracted much attention, because it has many advantages over pigment-based conventional coloring in terms of being non-toxic and highly durable in the environment, and providing high resolution. The asymmetric Fabry-Perot (FP) cavity absorber is the most manufacturable structure among coloring structures because it is simply produced and easily tunable. However, it cannot be applied practically because of the lack of a manufacturing technique that enables simultaneous fabrication of multicolor structures with different heights. Here, the fabrication of colored reflective characters based on various asymmetric FP absorbers with micrometer-scale pixel size are reported. Various cavities with different thicknesses are fabricated in a single step using UV imprint lithography and a simple deposition process. UV/visible spectroscopy is used to characterize the fabricated FP resonator. This absorber demonstrates high absorption, close to 90%, resulting in vivid colors with high resolution of 12700 DPI. It can be potentially used in reflective color displays field, functionalized color decorations, and security color patterns area. It is believed that this study would open up new possibilities for high density color printing in practical industry by introducing cost effective nanoimprint lithography technology.

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