2022
DOI: 10.1016/j.vacuum.2022.110932
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Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties

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Cited by 13 publications
(8 citation statements)
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“…Plasma treatment is a process that modifies any surface in a controlled, reproducible, and homogeneous manner. Mostly, it is used for surface cleaning, etching, functional group modification, or cross-linking of organic molecules/polymer chains. The plasma creates a number of reactive species, notably photons, electrons, ions, radicals, and so forth, and this process initiates secondary reactions as well . Here, Ar–O 2 plasma treatment is used for surface modification of CsPbBr 3 NCs films, as shown schematically in Figure a.…”
Section: Resultsmentioning
confidence: 99%
“…Plasma treatment is a process that modifies any surface in a controlled, reproducible, and homogeneous manner. Mostly, it is used for surface cleaning, etching, functional group modification, or cross-linking of organic molecules/polymer chains. The plasma creates a number of reactive species, notably photons, electrons, ions, radicals, and so forth, and this process initiates secondary reactions as well . Here, Ar–O 2 plasma treatment is used for surface modification of CsPbBr 3 NCs films, as shown schematically in Figure a.…”
Section: Resultsmentioning
confidence: 99%
“…Even for the same crystal plane, there are harder or softer polishing directions. For example, the <100> direction, along which a higher removal rate and better surface quality can be obtained, is considered to be a soft direction on the (001) plane, Energy beam polishing techniques of diamond [8,39,46,48,[50][51][52][53]. Reproduced from [8] with permission from the Royal Society of Chemistry.…”
Section: Scdmentioning
confidence: 99%
“…Reprinted from [48], Copyright (2013), with permission from Elsevier. Reprinted from [50], Copyright (2022), with permission from Elsevier. Reprinted from [51], Copyright (2021), with permission from Elsevier.…”
Section: Scdmentioning
confidence: 99%
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“…The spectrum was fitted into component peaks by the Voigt function and Shirley method for background deduction using OriginPro software. The fitted peaks are according to sp 2 (C=C) amorphous carbon, sp 3 (C-C) nanodiamond, C-O/C-O-C, and C=O atmospheric oxygen-containing groups at binding energies of 284.3 eV, 28) 284.9 eV, 29) 286.7 eV 30) and 288 eV, 31) respectively. To exclude the impact of these adsorbed oxygen functional groups on the accuracy of previous hardness assessment, the film was mechanically polished like a mirror prior to prompt hardness evaluation.…”
mentioning
confidence: 99%