2001
DOI: 10.1063/1.1367897
|View full text |Cite
|
Sign up to set email alerts
|

Surface electronic structure of plasma-treated indium tin oxides

Abstract: X-ray photoelectron spectroscopy (XPS) has been used to study the electronic structures of indium tin oxide (ITO) surfaces treated by O+, Ar+, and NHx+ plasmas. The XPS data show that there is a significant change in core level energies (In 3d5/2 O 1s, and Sn 3d5/2), in donor concentration (Sn4+), in valence band maximums (VBM), and in work functions on ITO surfaces being treated by O+ and NHx+ plasmas, compared with that of virgin and Ar+ plasma treated surfaces. Based on these experimental data, a surface ba… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

6
96
0

Year Published

2006
2006
2018
2018

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 190 publications
(104 citation statements)
references
References 14 publications
6
96
0
Order By: Relevance
“…The XPS system was equipped with a monochromatic Al Kα source. We took an Au 4f 7/2 peak at 83.86 eV or a C 1s peak at 285.0 eV for energy reference purposes [12,13]. The XPS core-level peaks were deconvolved into their various components by taking an 80% Gaussian and 20% Lorentzian mixed function [13].…”
mentioning
confidence: 99%
“…The XPS system was equipped with a monochromatic Al Kα source. We took an Au 4f 7/2 peak at 83.86 eV or a C 1s peak at 285.0 eV for energy reference purposes [12,13]. The XPS core-level peaks were deconvolved into their various components by taking an 80% Gaussian and 20% Lorentzian mixed function [13].…”
mentioning
confidence: 99%
“…However, the surface of ITO glass is chemically and physically ill defined, which will degrade the performance as the hole-injecting electrode in OLEDs. Over the past years, many methods were used to treat the surface of ITO [1]- [5], such as ultraviolet-ozone cleaning and oxygen plasma exposure, in order to enhance hole injection [1], [2]. These treatments were effective in removing residual surface contaminants and increasing oxygen content at ITO surface, resulting in the increase of work function to minimize interfacial charge injection barriers.…”
mentioning
confidence: 99%
“…The O1s intensity was deconvoluted into sub-peaks assigned to the following chemical entities: In 2 O 3 at a binding energy of 530.2 eV, SnO 2 at 531.4 eV, and the oxygen-containing organic contaminants (O-C=O and C-O) at 532.8 eV. Due to the low intensity of the hydrocarbon peak, the SnO 2 and (O-C=O and C-O) contributions were fitted with a single component at 532 eV (FWHM = 1.6) (Figure 4a) [21]. Samples which were exposed to the DDPO 4 solution at open circuit potential (Figure 4b) exhibited a C1s peak intensity with two components: a dominant component, C1s(a) at 285.0 eV (assigned to C-C) and a smaller component, C1s(b) at 286.6 eV (assigned to C-O-P).…”
Section: Resultsmentioning
confidence: 99%