Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm

Phan, Nhue Nguyen; Le, Hai Hoang; Duong, Dung Chi

doi:10.1117/1.oe.58.12.124105

Cited by 2 publications

(1 citation statement)

References 21 publications

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“…By solving the coordinates of the maximum interference intensity, the height information of the test surface can be obtained. The main methods to solve the height information include center of gravity method, polynomial fitting method, Fourier transform method, and coherent phase shift method [22][23][24][25][26][27][28][29][30][31] . Polynomial fitting method has strong noise suppression but more complex and slower calculations [32] .…”

Section: Center Of Gravity Methods For Solving the Height Informationmentioning

confidence: 99%

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Wu,

He,

Wang

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

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Asymmetric spectroscopic prism of a Michelson white-light interference- microscope objective introduces additional dispersion. The tilt of a reference mirror influences the dispersion and measurement accuracy of a white-light interference-based 3D reconstruction system. In this paper, we first numerically analyzed the performances of a Michelson-type interference-microscope objective by measuring a step structure at different tilt angles of the reference mirror. It showed that the height measurement errors were within the range of ±15nm when the tilt angles were 0°, 0.13°, 0.26°, 0.39° and 0.52 ° , respectively. Finally, a self-designed 5 × interference-microscope objective was used in the white-light 3D measurement system to experimentally demonstrate the influence of reference mirror tilting on the measurement. Both experimental and simulated results are in good agreement, showing that the tilt angle of the reference mirror in a 5× Michelson interference-microscope objective should be less than 0.39° while maintaining a measurement error less than ±15nm. We believe our results can provide a theoretical study for the assembly of reference mirror in a Michelson interference-microscope objective.

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Section: Center Of Gravity Methods For Solving the Height Informationmentioning

confidence: 99%

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Wu,

He,

Wang

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

View full text Add to dashboard Cite

show abstract

Coarse-to-fine auto-focus method using a white-and-red light source for white-light scanning interferometers

Huang

Liu

et al. 2023

Optik

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Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm

Cited by 2 publications

References 21 publications

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Coarse-to-fine auto-focus method using a white-and-red light source for white-light scanning interferometers

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