1978
DOI: 10.1016/0040-6090(78)90376-0
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Surface cleaning in thin film technology

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Cited by 57 publications
(8 citation statements)
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“…Regardless of coating formulation, the contact angles on washed Ti plates were much larger than those on plasma-cleaned Ti plates, suggesting that the process of washing produced a relatively hydrophobic surface, whereas plasma cleaning gave rise to a very hydrophilic surface. Surface wettability (i.e., the degree of surface energy and hydrophilicity) is a good indication of the amount of contamination by hydrophobic organic impurities [28], Therefore, contact angle measurements indicate that plasma cleaning is more effective at removing contaminants from the Ti surface than washing with organic solvents, consistent with previous findings [29]. …”
Section: Resultssupporting
confidence: 84%
“…Regardless of coating formulation, the contact angles on washed Ti plates were much larger than those on plasma-cleaned Ti plates, suggesting that the process of washing produced a relatively hydrophobic surface, whereas plasma cleaning gave rise to a very hydrophilic surface. Surface wettability (i.e., the degree of surface energy and hydrophilicity) is a good indication of the amount of contamination by hydrophobic organic impurities [28], Therefore, contact angle measurements indicate that plasma cleaning is more effective at removing contaminants from the Ti surface than washing with organic solvents, consistent with previous findings [29]. …”
Section: Resultssupporting
confidence: 84%
“…In earlier work in which plasma cleaning was used in areas other than biomaterials, the following factors were found to be important for optimal cleanliness 19,[36][37][38] : 1) clean preparation systems with a low base pressure (<10 −5 Pa) and proper nongassing materials, 2) (ultra) clean process gases, 3) a system configuration without direct line of sight between the sample and foreign materials, 4) sufficient gas flow (turnover of process gas), and 5) surface passivation prior to exposure to uncontrolled atmospheres.…”
Section: Introductionmentioning
confidence: 99%
“…[26] After drying with nitrogen, the two halves were then exposed to an oxygen plasma for 2 min. After plasma treatment, the two halves were brought together under a stream of deionized pure water, and then visually inspected for the presence of air bubbles between the glass plates.…”
Section: Methodsmentioning
confidence: 99%