Surface Chemical Reactions During Atomic Layer Deposition of Zinc Oxynitride (ZnON)

Ngoc Van, Tran Thi; Shong, Bonggeun

doi:10.1007/s13391-023-00467-8

Electron. Mater. Lett.

2023

DOI: 10.1007/s13391-023-00467-8

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Surface Chemical Reactions During Atomic Layer Deposition of Zinc Oxynitride (ZnON)

Tran Thi Ngoc Van,

Bonggeun Shong

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Surface Chemical Reactions During Atomic Layer Deposition of Zinc Oxynitride (ZnON)

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References 49 publications

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