2000
DOI: 10.1016/s0022-0248(00)00834-4
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Surface characterization of transparent conductive oxide Al-doped ZnO films

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Cited by 232 publications
(117 citation statements)
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“…The residual stress (σ) of the thin films can be determined from a biaxial strain model analysis [32]. Accordingly, the lattice parameters and elastic stiffness constants of the single crystal ZnO are related in the following formula: [33].…”
Section: Resultsmentioning
confidence: 99%
“…The residual stress (σ) of the thin films can be determined from a biaxial strain model analysis [32]. Accordingly, the lattice parameters and elastic stiffness constants of the single crystal ZnO are related in the following formula: [33].…”
Section: Resultsmentioning
confidence: 99%
“…The low binding energy component (OI) is from the O2-ions wurtzite structure of the hexagonal Zn2+ ion array, surrounded by Zn (or the substitution of Ga) atoms [11]. The component on the low binding energy (OI) side of the O1s spectrum at 529.77 eV can be attributed to O2-ions surrounding surrounded by the Zn, Ga, and Ag in the atoms [12]. The density of this component is a measure of the number of oxygen atoms in a fully oxidized stoichiometric atmosphere.…”
Section: Resultsmentioning
confidence: 99%
“…4. Earlier investigations stated that the binding energy of oxygen 1s (O 1s) located at near 532.30 eV usually originates from the presence of loosely bound oxygen on the surface of IZO film belonging to a specific specie, e.g., -CO 3 or adsorbed H 2 O or adsorbed O 2 (22)(23)(24)(25)(26)(27)(28). The binding energy at 531.51 eV is associated with O 2− ions that are in oxygen deficient regions of the IZO film.…”
Section: Ecs Transactions 41 (6) 265-271 (2011)mentioning
confidence: 99%