1987
DOI: 10.1002/xrs.1300160104
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Surface and near‐surface chemical characterization by low‐energy electron‐induced X‐ray spectrometry (LEEIXS): A review

Abstract: Various experiments show that low‐energy electron‐induced X‐ray spectrometry (LEEIXS), using a gas discharge tube as an efficient and stable electronic excitation source, represents a powerful new technique in many fields of research related to surface and near‐surface chemical characterization of materials. The instrument is a wavelength‐dispersive X‐ray spectrometer capable of high qualitative or quantitative performances in the soft and ultra‐soft region (λ = 0.3—10 nm). LEEIXS applications given in this pa… Show more

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Cited by 43 publications
(6 citation statements)
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“…2 These transitions can be excited even better by using low-energy electrons instead of x-rays, which is called low-energy electron induced x-ray spectrometry (LEEIXS). 3 A further analytical method using electron excitation is electron probe x-ray microanalysis (EPXMA). LEEIXS and EPXMA differ in lateral resolution and in the applied acceleration voltage, resulting in different kinetic energies of the impinging electrons.…”
Section: Introductionmentioning
confidence: 99%
“…2 These transitions can be excited even better by using low-energy electrons instead of x-rays, which is called low-energy electron induced x-ray spectrometry (LEEIXS). 3 A further analytical method using electron excitation is electron probe x-ray microanalysis (EPXMA). LEEIXS and EPXMA differ in lateral resolution and in the applied acceleration voltage, resulting in different kinetic energies of the impinging electrons.…”
Section: Introductionmentioning
confidence: 99%
“…5 sind die L-Linien einer Eisen-Nickel-Legierung dargestellt, die zum einen mit der RFA und zum Tab. 1 Vergleich der Elektronenmikrosonde (EPMA), der Soft-X-ray Spektrometry (LEEIXS) und der Röntgenfluoreszenz-analyse (RFA) [3,15] 0 500 1000 1500 2000 2500 3000 45 55 65 75 85 95 105 115 2 Theta (°) __________________________________________________________________________________ PROGRESS REPORT anderen mit einem LEEIX-Spektrometer aufgenommen wurden. Im LEEIX-Spektrum erkennt man deutlich einen höheren Untergrund bei niedrigeren Wellenlängen, der bei Elektronenanregung durch die gleichzeitig emittierte Bremsstrahlung verursacht wird.…”
Section: Vergleich Der Beschriebenen Methodenunclassified
“…Zudem eignet sie sich besonders zur Soft-X-raySpektrometrie und somit zur Bestimmung der Wertigkeit und des Bindungspartners eines Elementes. Durch den Einbau von Elektronenquellen in konventionelle Röntgenfluoreszenzspektrometer und die Weiterentwicklung der dispersiven Bestandteile sind in den letzl ten Jahren auf dem Gebiet der Anwendungen große Fortschritte gemacht worden [3,8]. So gibt es Veröf-fentlichungen zur quantitativen Bestimmung und Speziation der leichten Elemente wie B, C, N, O und S [9,10,11]…”
Section: Soft-x-ray-spektrometrie (Leeixs)unclassified
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“…XP and Auger spectroscopy, which both monitor the top five to ten atomic layers (1-2 nm), can be complimented by soft X-ray spectroscopy when the spectra are produced by low-energy electron bombardment. If the electron energy is varied then non-destructive depth profiling of surface layers is possible (Romand et al, 1987;Szfisz et al, 1984). The chemical information carried by the XE spectra enables the chemical state of each element to be determined as a function of depth as well.…”
Section: Future Developments--conclusionmentioning
confidence: 99%