Surface and coordinate measurements with nanomeasuring machines

Hausotte, Tino; Balzer, Felix-Gerhard; Vorbringer-Dorozhovets, Nataliya; Manske, Eberhard

doi:10.1504/ijnm.2012.051110

Cited by 6 publications

(4 citation statements)

References 19 publications

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“…The research at TU Ilmenau is devoted to this task. The basic approach is to link synergistically-at the highest level-efficient tip-based and laser-based micro-and nanofabrication techniques with the outstanding possibilities offered by the nanopositioning and measuring machine (NPMM) developed at TU Ilmenau [17][18][19][20]; see figure 1. This machine, which achieves the highest resolutions (up to 10 −10 ) [16] in scale-independent measuring and positioning ranges, is supposed to enable a completely new kind of nanofabrication.…”

Section: Aimsmentioning

confidence: 99%

“…On the basis of the experiences gained with the integrated direct drive systems with aerostatic guiding, designed and investigated for the NPMM, high-precision drive systems with aerostatic [102,103] and also purely magnetic guiding [104,105] have been set up, for the Physikalisch-Technische Bundesanstalt (PTB) among others. Important contributions to the conceptual design of the new generation of NPMMs have been worked out, presenting a measuring range of 200 × 200 × 25 mm 3 [18], whereby magnetic drive systems were realised and integrated. An example of a magn etic vertical actuator guide including weight force compensation is shown in figure 8.…”

Section: State-of-the-art and Own Workmentioning

confidence: 99%

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Towards alternative 3D nanofabrication in macroscopic working volumes

Kühnel

Fröhlich

Füßl

et al. 2018

Meas. Sci. Technol.

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This paper gives an overview of the research carried out at TU Ilmenau towards the development and application of tip- and laser-based nanofabrication on flat and curved surfaces in extended macroscopic working areas. It is shown that sub-10 nm structures can be fabricated by scanning probe lithography (SPL). The use of soft stamps has revealed their suitability for nanoimprinting on curved surfaces. Laser-based methods for a maskless exposure of resist on curved surfaces utilising 405 nm laser diodes have already been tested successfully. Furthermore, the current work deals with two-photon polymerisation, which has great potential with regard to the fabrication of sub-wavelength structures. At present, the methods mentioned have all been applied only in working ranges <100 × 100 μm2 in the plane and <10 μm in height. To overcome these limitations, the nanofabrication techniques are now being integrated in the nanopositioning and measuring machines (NPMMs) developed at TU Ilmenau. They offer working volumes of up to 200 × 200 × 25 mm3 with a positioning resolution of 20 pm. To provide access to any geometry elements in the 3D space with nanometre precision, the machine concepts as well as the metrological concepts are further developed. Due to the increased demands of lowest trajectory deviations within the fabrication process, new real-time controllers for probing and fabrication systems are investigated, as well as interactions in combined force and positioning sensors. Further important research is carried out into interference lithography, to enable an exposure of non-planar substrates and to improve the lateral structure resolution at the same time. A mix-and-match combination of such methods that allows the simultaneous exposure of large substrate regions with nanofabrication methods such as SPL becomes possible on the basis of the NPMMs, and is another area of great potential with regard to the research work presented in this paper.

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Section: Aimsmentioning

confidence: 99%

Section: State-of-the-art and Own Workmentioning

confidence: 99%

Towards alternative 3D nanofabrication in macroscopic working volumes

Kühnel

Fröhlich

Füßl

et al. 2018

Meas. Sci. Technol.

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“…The NMM-1 features a positioning and measuring the volume of 25 mm x 25 mm x 5 mm and increases the sensor's measurement range equivalently. A reliable measurement resolution of 0.1 nm can be achieved and for the entire measurement range, the positioning uncertainty is less than 10 nm [5]. The machine provides a range of different scan functions especially advanced instructions to flexibly operate the three-dimensional measurement tasks.…”

Section: Development Of a 3d Tunneling Current Probing Systemmentioning

confidence: 99%

Development of a 3D Tunneling Current Probing System for Micro- and Nano-Coordinate Metrology

Sun

Schuler

Hausotte

2017

AMM

Self Cite

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The demands for precision measurement of three dimensional micro-and nanogeometries over a large area have rapidly increased during the last few years. To meet such requirements, many different nanometre resolving 3D capable probing sensors and corresponding 3D positioning systems to operate the sensors for 3D measurements have been developed. The mechanical contact-free, electrical work piece probing based on the scanning tunneling microscopy principle offers new possibilities for 3D micro coordinate measurements as well as for nanometre resolved topography measurements in micro-and nanometrology. This paper introduces an updated version of this probing sensor system extended with a 3D movable piezo scanner to directly detect its probing direction. With the magnitude and the direction of the contact vector forwarded to the position control of the nanopositioning and nanomeasuring machine NMM-1 all of the 3D measurement commands of NMM-1 can be utilized, allowing 3D surface scans and especially 3D free-form surface scans.

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“…To make full use of the sensor's capabilities it was integrated in a nanopositioning and nanomeasuring system NMM-1 (Hausotte, 2011;Hausotte et al, 2012;Schott et al, 2013). The NMM-1 features a positioning and measuring volume of 25 mm × 25 mm × 5 mm and increases the sensor's measurement range equivalently.…”

Section: Development Of a 3-d Nanometre Measurement Systemmentioning

confidence: 99%

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

Schuler

Hausotte

Sun

2015

J. Sens. Sens. Syst.

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Abstract. Measurement tasks of modern micro-and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.

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Surface and coordinate measurements with nanomeasuring machines

Cited by 6 publications

References 19 publications

Towards alternative 3D nanofabrication in macroscopic working volumes

Towards alternative 3D nanofabrication in macroscopic working volumes

Development of a 3D Tunneling Current Probing System for Micro- and Nano-Coordinate Metrology

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

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