Surface analysis of polyimide bombarded by charged water droplets

Hiraoka, Kenzo; Sakai, Yuji; Iijima, Yoshitoki

doi:10.1116/1.3420465

Cited by 23 publications

(24 citation statements)

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“…Thus the remarkably small roughness observed for non‐selected beam must be due to the fact that larger‐size clusters suppress the surface roughening. In our previous A‐EDI experiment, the surface roughness for PI was measured as 15 − 20 nm with the dose of 1.5 × 10 12 ions/cm 2 . This value is similar to those obtained by G1 and G2 in Fig.…”

Section: Resultsmentioning

confidence: 99%

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Sputtering properties for polyimide by vacuum electrospray droplet impact (V-EDI) using size-selected cluster ions

Sakai

Ninomiya

Hiraoka

2016

Surf. Interface Anal.

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a Recently, the vacuum electrospray droplet impact (V-EDI) was developed as a cluster ion beam source in our laboratory. To attain the ion beam stability and compact design of the ion source, a silica nano-capillary with 15 μm i.d. was used as the emitter of the beam. It was found that stable electrospray was generated from the capillary tip without the use of laser heating when aqueous solution of 20% ethanol was used. The m/z distribution of electrospray droplets was measured by pulsing the primary beam. By assuming that the charged droplets contain 50% of the excess charges defined by the Rayleigh limit equation, the average mass, and charge of the droplets generated by the present V-EDI are estimated as 2. ) were generated. Surface analysis for polyimide (PI) film by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) was made using G1, G2, and non-selected cluster beams. No selective etching was observed when G1, G2, and non-selected beams were used. However, larger surface roughening was observed when smaller size cluster beams were used. This suggests that larger size clusters cure the surface damage caused by the smaller ones.

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Section: Resultsmentioning

confidence: 99%

“…The typical cluster ions are represented as [(H 2 O) 90,000 + 100H] 100+ . In A‐EDI, non‐selective etching for organic and also inorganic materials were achieved . In A‐EDI, however, it is difficult to focus the beam due to the diversion of the gas flow when the atmospheric gas bearing cluster ions is introduced into the vacuum.…”

Section: Introductionmentioning

confidence: 99%

Sputtering properties for polyimide by vacuum electrospray droplet impact (V-EDI) using size-selected cluster ions

Sakai

Ninomiya

Hiraoka

2016

Surf. Interface Anal.

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“…The H atoms in H 2 O molecules in the droplet projectile have the lightest mass among all elements, and the momentum of the impinging droplets would be preserved mainly by backscattered H atoms at the instant of collision. The efficient dissipation of the collision energy as shockwaves propagating through the water droplets and the substrate may explain the atomic or molecular‐level desorption with high ionization efficiency . In a sense, the kinetic energy of water droplets is efficiently converted to internal energies in supersonic collisions in EDI.…”

Section: Resultsmentioning

confidence: 99%

XPS depth analysis of CuO by electrospray droplet impact

Sakai

Ninomiya

Hiraoka

2012

Surface & Interface Analysis

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aThe electrospray droplet impact (EDI) is presented as a new etching technique that induces almost no surface damage left after irradiation. We have previously reported that selective etching was not observed after EDI irradiation for organic materials. The present work made a comparative XPS study on the CuO etched by Ar + and EDI. Although marked reduction of CuO was observed with Ar + etching, no chemical modification was occurred by EDI. The etching rate of a few nm/min with EDI was estimated for copper oxide under the present experimental conditions.

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“…A hypothetical model describing the ionization/desorption induced by EDI 43) is shown in Fig. 14. Water droplets with a diameter of ∼10 nm impact the sample surface with a velocity of ∼12 km/s, which is higher than the sound velocity in various solids.…”

Section: Electrospray Droplet Impactmentioning

confidence: 99%

Desorption in Mass Spectrometry

et al. 2017

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In mass spectrometry, analytes must be released in the gas phase. ere are two representative methods for the gasi cation of the condensed samples, i.e., ablation and desorption. While ablation is based on the explosion induced by the energy accumulated in the condensed matrix, desorption is a single molecular process taking place on the surface. In this paper, desorption methods for mass spectrometry developed in our laboratory: ash heating/rapid cooling, Leidenfrost phenomenon-assisted thermal desorption (LPTD), solid/solid friction, liquid/solid friction, electrospray droplet impact (EDI) ionization/desorption, and probe electrospray ionization (PESI), will be described. All the methods are concerned with the surface and interface phenomena. e concept of how to desorb less-volatility compounds from the surface will be discussed.Copyright © 2017 Dilshadbek Tursunbayevich Usmanov, Satoshi Ninomiya, Lee Chuin Chen, Subhrakanti Saha, Mridul Kanti Mandal, Yuji Sakai, Rio Takaishi, Ahsan Habib, Kenzo Hiraoka, Kentaro Yoshimura, Sen Takeda, Hiroshi Wada, and Hiroshi Nonami. is is an open access article distributed under the terms of Creative Commons Attribution License, which permits use, distribution, and reproduction in any medium, provided the original work is properly cited and is not used for commercial purposes.Please cite this article as: Mass Spectrom (Tokyo) 2017; 6(2): S0059 Keywords: desorption, ablation, thermal desorption, Leidenfrost phenomenon, ash heating, electrospray droplet impact ionization, probe electrospray ionization (Received September 20, 2016; Accepted January 4, 2017) RATIONALE: ABLATION VS. DESORPTION e two technical terms, ablation and desorption, should be distinguished rigorously. As shown in Fig. 1, ablation is induced by explosion of the matrix or substrate whereas desorption is a single molecular event, i.e., detachment of a single molecule from the surface. e antonym of desorption is adsorption.In matrix assisted laser desorption/ionization (MALDI), for example, the photon energy is ultimately converted to thermal energy and ablation of the matrix takes place above the critical laser power (Fig. 1(a)). In ablation, the ablated materials are mainly composed of aggregates. us the ions observed in MALDI are only a small part of materials ablated. In this respect, MALDI is more likely matrixassisted laser "ablation" ionization. In secondary ion mass spectrometry (SIMS), primary projectiles such as Ar, and (Ar) n + are used. In SIMS using atomic ion projectiles, the sputtering is caused by the cascade collisions in the sample. us the useful yield de ned as [total gas phase ions detected] divided by [total amount of sample sputtered] is rather low. e small useful yields for MALDI and SIMS (10 −5 -10) originate from the fact that photons or primary beams penetrate into the target materials leading to the sputtering of the substrate. In contrast, the useful yield for desorption-based techniques could be much higher than MALDI and SIMS if the desorbed molecules are ionized by high-e cien...

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Surface analysis of polyimide bombarded by charged water droplets

Cited by 23 publications

References 20 publications

Sputtering properties for polyimide by vacuum electrospray droplet impact (V-EDI) using size-selected cluster ions

Sputtering properties for polyimide by vacuum electrospray droplet impact (V-EDI) using size-selected cluster ions

XPS depth analysis of CuO by electrospray droplet impact

Desorption in Mass Spectrometry

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