The
family of layered BiTeX (X = Cl, Br, I) compounds are intrinsic
Janus semiconductors with giant Rashba-splitting and many exotic surface
and bulk physical properties. To date, studies on these materials
required mechanical exfoliation from bulk crystals which yielded thick
sheets in nonscalable sizes. Here, we report epitaxial synthesis of
Janus BiTeCl and BiTeBr sheets through a nanoconversion technique
that can produce few triple layers of Rashba semiconductors (<10
nm) on sapphire substrates. The process starts with van der Waals
epitaxy of Bi2Te3 sheets on sapphire and converts
these sheets to BiTeCl or BiTeBr layers at high temperatures in the
presence of chemically reactive BiCl3/BiBr3 inorganic
vapor. Systematic Raman, XRD, SEM, EDX, and other studies show that
highly crystalline BiTeCl and BiTeBr sheets can be produced on demand.
Atomic level growth mechanism is also proposed and discussed to offer
further insights into growth process steps. Overall, this work marks
the direct deposition of 2D Janus Rashba materials and offers pathways
to synthesize other Janus compounds belonging to MXY family members.