Surface acoustic wave spectroscopy for non‐destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor

Abstract

Surface acoustic wave spectroscopy has been established as non‐destructive and fast method for characterization of mechanical properties of surfaces and bulk materials in both research and industry. The present work shows that by application of a novel and robust aluminum nitride (AlN) coated piezoelectric contact sensor the advantages of the method can be extended from room temperature to at least 600°C. An overview of sensor concepts and applications of the method is discussed first, followed by theoretical and practical considerations for design and coating of a novel temperature stable contact sensor. After fabrication of such a sensor using magnetron sputtering, it was tested in a modified surface acoustic wave spectroscopy setup with an incorporated heating table concerning signal amplitude and frequency range. The AlN coated sensor was found to perform well up to 600°C, with temperature limited by the specification of the heating table. At room temperature, performance was acceptable when compared with a conventional contact sensor using a PVDF piezoelectric foil. Application of the high temperature capabilities of the setup was demonstrated by measuring temperature stability of hydrogen‐free amorphous carbon coatings (a‐C and ta‐C) depending on their sp3 carbon ratio. In another example, high precision temperature dependent measurement of Young's modulus for ultrasonic fatigue test specimen was taken, achieving an accuracy better than 1%. Use of the developed sensor opens up new possibilities in material science for in situ study of temperature depending mechanical properties for coatings and surfaces.

Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection

“…Among ceramic piezoelectric materials used for pressure sensors fabrication, aluminum nitride (AlN) is one of the most considered due to its interesting properties suitable for this application. It works in a stable way in high-temperature environments, keeping its piezoelectric characteristics at temperatures up to 1150 • C [25]. Moreover, AlN does not require electric-thermal poling such as ferroelectrics, being naturally piezoelectric, and it is a lead-free environmentally friendly ceramic material compared to lead zirconate titanate (PZT), which suffers the presence of hazardous lead (Pb) despite its excellent piezoelectric properties [26].…”