Surface acoustic wave probe for mechanical analysis of thin films and liquids

Abstract

Specially designed surface acoustic wave (SAW) probes for the investigation of mechanical properties of solid films with or without contact with a liquid are presented. An appropriate and comprehensive simulation tool has been developed to work out the specific advantages of the proposed probing system, to interpret the SAW data and to optimize the probing devices for special measurement purposes. Substantial improvements by the use of additional coatings were calculated. The authors present the use of a SAW probe with horizontally polarized shear waves, with additional coatings of known consistency and with an appropriate and comprehensive simulation tool, which altogether leads to a substantial reduction of cross-sensitivities and a major simplification for the interpretation of experimental SAW data.