2017
DOI: 10.1007/s13391-017-6348-6
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Suppression of nanoindentation-induced phase transformation in crystalline silicon implanted with hydrogen

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Cited by 2 publications
(2 citation statements)
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“…The discovery of a number of specific structures and phase transformations in silicon material [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] has attracted great attention in semiconductor industry in the recent decades. The physical properties of silicon materials are significantly affected by stress, which may lead to the evolution of phase transformation and the change of electric conductivity of the material.…”
Section: Introductionmentioning
confidence: 99%
“…The discovery of a number of specific structures and phase transformations in silicon material [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] has attracted great attention in semiconductor industry in the recent decades. The physical properties of silicon materials are significantly affected by stress, which may lead to the evolution of phase transformation and the change of electric conductivity of the material.…”
Section: Introductionmentioning
confidence: 99%
“…At present, there is a growing interest in understanding the mechanical properties of micro-and nanosized structures due to their wide applications in the development of micro-electromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) [1][2][3][4][5][6]. These micro and nano components are capable of withstanding complex stress with little risk of failure.…”
Section: Introductionmentioning
confidence: 99%