Suppression of driving laser in high harmonic generation with a microchannel plate

Zhang, Qi; Zhao, Kun; Li, Jie; Chini, Michael; Yan, Chao; Wu, Yi; Cunningham, Eric; Chang, Zenghu

doi:10.1364/ol.39.003670

Cited by 28 publications

(21 citation statements)

References 21 publications

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“…High harmonic sources require dedicated optics to select specific XUV spectral components, while rejecting the drive laser light and low orders of harmonics. 77,78 The spectral purity of EUV plasma sources, and the mitigation of UV and IR have actually become two of the challenges in the development of EUV photo-lithography. 79 A multilayer mirror combined with different filters can be used to improve the spectral purity, [80][81][82] but it usually has a poor EUV transmission and a free-standing filter might be prone to damage.…”

Section: High Spectral Purity ML Mirrorsmentioning

confidence: 99%

“…78,79 For instance, the typical laser produced Sn-plasma source used in EUVL has a wide spectrum which also includes a large amount of infrared power from the drive laser (k ¼ 10.6 lm) scattered by the tin plasma. This IR light will be highly reflected by the metal in the multilayer mirror and propagated into the optical system causing heat load problems.…”

Section: Ir Antireflectionmentioning

confidence: 99%

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Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: High Spectral Purity ML Mirrorsmentioning

confidence: 99%

Section: Ir Antireflectionmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…Due to the spectral, spatial, and temporal properties of HHG radiation, its applications range from fundamental atomic and molecular physics to material science, biology, and medicine [1][2][3], and great effort is being put into further source development [4][5][6] and scaling to high repetition rates and high laser pulse energies [7,8]. Since high-order harmonics are generated from an infrared laser pulse by nonlinear interaction with a gaseous medium, one task is to filter out the fundamental infrared beam to ensure a pure interaction of the sample with XUV radiation [9][10][11]. This becomes even more important if a part of the infrared laser pulses is used to initiate a dynamic process, and its subsequent evolution is monitored with delayed XUV pulses ( Figure 1).…”

Section: Introductionmentioning

confidence: 99%

Online Monitoring of Laser-Generated XUV Radiation Spectra by Surface Reflectivity Measurements with Particle Detectors

et al. 2017

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Abstract:In this contribution, we present a wavelength-sensitive method for the detection of extreme ultraviolet (XUV) photon energies between 30 eV and 120 eV. The method is based on 45 • reflectivity from either a cesium iodide-coated or an uncoated metal surface, which directs the XUV beam onto an electron or ion detector and its signal is used to monitor the XUV beam. The benefits of our approach are a spectrally sensitive diagnosis of the XUV radiation at the interaction place of time-resolved XUV experiments and the detection of infrared leak light though metal filters in high-harmonic generation (HHG) experiments. Both features were tested using spectrally shaped XUV pulses from HHG in a capillary, and we have achieved excellent agreement with XUV spectrometer measurements and reflectivity calculations. Our obtained results are of interest for time-resolved XUV experiments presenting an additional diagnostic directly in the interaction region and for small footprint XUV beamline diagnostics.

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“…At present, studies of X-ray transmission through the micro-capillary structures, aimed at the R&D of dedicated optics working in the ''water window'' spectral region are limited. Being large and effective low weight optics, the micro-channel plates (MCPs) have been already used in case of the low power instruments for different scientific applications and techniques development [2]. Their characteristics make them suitable for many other applications, for example, such as focusing of the excited radiation.…”

Section: Introductionmentioning

confidence: 99%