2008
DOI: 10.1002/adma.200701021
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Superelastic and Spring Properties of Si3N4 Microcoils

Abstract: Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si3N4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.

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Cited by 54 publications
(48 citation statements)
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“…18 The resultant SiCN was then decomposed to produce SiO 2 through reaction (1), 21 where the oxygen may come from the precursor or survival in air. The CO 2 further reacted with the solid C that resulted from the decomposition of the polymer precursor to form CO by reaction (2). Then, the SiO vapor was produced by reaction (3) to provide high partial pressures of SiO.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…18 The resultant SiCN was then decomposed to produce SiO 2 through reaction (1), 21 where the oxygen may come from the precursor or survival in air. The CO 2 further reacted with the solid C that resulted from the decomposition of the polymer precursor to form CO by reaction (2). Then, the SiO vapor was produced by reaction (3) to provide high partial pressures of SiO.…”
Section: Resultsmentioning
confidence: 99%
“…I N recent years, various silicon nitride (Si 3 N 4 ) nanostructures have been synthesized due to their superior properties, such as low density, high strength at high temperature, low coefficient of thermal expansion, and good resistance to corrosion, wear, thermal shock, and creep. [1][2][3] Besides, Si 3 N 4 is a wide band gap (5.3 eV) semiconductor. Si 3 N 4 nanomaterials exhibit novel electric and optical properties.…”
Section: Introductionmentioning
confidence: 99%
“…Similar phenomena have been observed in other inorganic helical materials. 18,19 The above study reveals that Eq. ͑14͒ is a good approximation to analyze the mechanical properties of double-helix CMCs.…”
Section: Cmcsmentioning
confidence: 89%
“…17,18 In particular, it has been revealed that the spring constant k remains constant in the low-strain region. However, it increases nonlinearly in each loading process with increasing the relative elongation above a certain threshold.…”
Section: Mechanical Model and Superelastic Properties Of Carbon Micromentioning
confidence: 98%
“…keeping their average bond length nearly invariant under the maximum relative elongation of ~42% (Chen et al, 2003;Cao et al, 2008;Liu et al, 2010;Dai & Shen, 2009). …”
Section: Fig Urementioning
confidence: 99%