We report on the superconducting properties of a series of heavily doped Si:B epilayers grown by gas immersion laser doping with boron content (n B ) ranging from ∼3 × 10 20 cm −3 to ∼6 × 10 21 cm −3 and thickness (d) varying between ∼20 nm and ∼210 nm. We show that superconductivity is only observed for n B values exceeding a threshold value (n c,S ) which scales as n c,S ∝ 1/d. The critical temperature (T c ) then rapidly increases with n B , largely exceeding the theoretical values which can be estimated by introducing the electron-phonon coupling constant (