1973
DOI: 10.1063/1.1662193
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Superconducting properties, electrical resistivities, and structure of NbN thin films

Abstract: Superconducting properties and electrical resistivities of NbN thin films have been studied as a function of sputtering parameters, film structure, and composition. A good correlation exists between superconducting Tc's and film structure and composition regardless of the sputtering conditions used to achieve this structure. The most important parameters affecting Tc are lattice parameter, crystal structure, island structure, and impurity content. Substrate temperature, Ar/N2 ratio, and impurity content are th… Show more

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Cited by 107 publications
(45 citation statements)
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“…Vanadium nitride (VN) has extreme hardness, high-temperature stability, and electrical conductivity that make this material suitable for many uses. The traditional applications of these materials range from cutting tools and structural materials [1,2] to magnetic and electric components [3], and superconducting devices [4][5][6]. Moreover, there is increasing interest on vanadium nitride as an important industrial catalyst known for its selectivity and stability [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…Vanadium nitride (VN) has extreme hardness, high-temperature stability, and electrical conductivity that make this material suitable for many uses. The traditional applications of these materials range from cutting tools and structural materials [1,2] to magnetic and electric components [3], and superconducting devices [4][5][6]. Moreover, there is increasing interest on vanadium nitride as an important industrial catalyst known for its selectivity and stability [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…For example, superconductor-insulator-superconductor mixers are usually fabricated on substrates with low dielectric constants and single flux quantum circuits are prepared on Si wafers. [13][14][15] However, because the superconducting properties of NbN films are dependent on the crystal structures of the film, 16,17 it is difficult to fabricate high-quality NbN tunnel junctions on substrates other than MgO. Despite several attempts to develop NbN tunnel junctions using Si substrates, 18,19 to date, there have been no reports of junctions with a high quality similar to that of epitaxial NbN junctions fabricated on MgO substrates.…”
mentioning
confidence: 98%
“…Owing to their useful properties and their growing importance in industry, metal nitrides have been of great interest to the broad scientific community for decades [1,2]. Among these materials, CrN is one of the most important compounds, which has many promising applications in a wide range of areas, for example, it can be used in the field of wear and corrosion apparatus, based on its properties of high hardness and good corrosion resistance [3].…”
Section: Introductionmentioning
confidence: 99%