Superconducting material diagnostics using a scanning near-field microwave microscope

Anlage, Steven M.; Steinhauer, D. E.; Vlahacos, C. P.; Feenstra, B. J.; Thanawalla, Ashfaq S.; Hu, Wensheng; Dutta, S. K.; Wellstood, F. C.

doi:10.1109/77.783934

Cited by 17 publications

(6 citation statements)

References 15 publications

(24 reference statements)

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“…Thus, it was possible to measure topography of an evenly conducting sample without employing distance feedback techniques. Anlage et al 274 used a sharp STM tip as an extension of the coaxial center conductor to increase spatial resolution and achieved resolution down to 1 m when scanning in contact. A very similar setup was then used by Steinhauer et al 275 and Vlahacos et al 276 to quantitatively image microwave permittivity and tunability in thin films.…”

Section: Open Resonant Coaxial Resonatormentioning

confidence: 99%

High-frequency near-field microscopy

Rosner

Weide

2002

Review of Scientific Instruments

218

133

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Conventional optics in the radio frequency ͑rf͒ through far-infrared ͑FIR͒ regime cannot resolve microscopic features since resolution in the far field is limited by wavelength. With the advent of near-field microscopy, rf and FIR microscopy have gained more attention because of their many applications including material characterization and integrated circuit testing. We provide a brief historical review of how near-field microscopy has developed, including a review of visible and infrared near-field microscopy in the context of our main theme, the principles and applications of near-field microscopy using millimeter to micrometer electromagnetic waves. We discuss and compare aspects of the remarkably wide range of different near-field techniques, which range from scattering type to aperture to waveguide structures.

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Section: Open Resonant Coaxial Resonatormentioning

confidence: 99%

High-frequency near-field microscopy

Rosner

Weide

2002

Review of Scientific Instruments

218

133

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“…This data is stored by a computer, which also controls the scanning of the sample beneath the probe. We have shown previously that the spatial resolution of the microscope in this mode of operation is about 1 m. 17,19 Our probes 17,19,21 are constructed using a short section of semirigid coaxial cable, where we have replaced the center conductor with a capillary tube of the same outer diameter. The probe tip is a commercial scanning tunneling microscope conical tungsten tip 22 which is inserted into the capillary tube, and held in place by friction.…”

Section: Description Of the Microscopementioning

confidence: 99%

“…Cavity perturbation 10 and waveguide transmission 11 techniques have also been used, but have the disadvantage of measuring the entire sample. More recently, near-field microscopy techniques [12][13][14][15][16][17][18][19] have allowed quantitative measurements with spatial resolutions much less than the wavelength. These techniques use a resonator which is coupled to a localized region of the sample through a small probe, and have the advantage of being nondestructive.…”

Section: Introductionmentioning

confidence: 99%

Quantitative imaging of dielectric permittivity and tunability with a near-field scanning microwave microscope

Steinhauer

Vlahacos

Wellstood

et al. 2000

Review of Scientific Instruments

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We describe the use of a near-field scanning microwave microscope to image the permittivity and tunability of bulk and thin film dielectric samples on a length scale of about 1 m. The microscope is sensitive to the linear permittivity, as well as to nonlinear dielectric terms, which can be measured as a function of an applied electric field. We introduce a versatile finite element model for the system, which allows quantitative results to be obtained. We demonstrate use of the microscope at 7.2 GHz with a 370 nm thick Ba 0.6 Sr 0.4 TiO 3 thin film on a LaAlO 3 substrate. This technique is nondestructive and has broadband ͑0.1-50 GHz͒ capability. The sensitivity of the microscope to changes in permittivity is ⌬⑀ r ϭ2 at ⑀ r ϭ500, while the nonlinear dielectric tunability sensitivity is ⌬⑀ 113 ϭ10 Ϫ3 ͑kV/cm͒ Ϫ1 .

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“…In addition, the MIM can significantly suppress the common-mode signal since the inductive probe is separated from the excitation electrode. Compared to atomic force microscopy (AFM) and scanning tunneling microscopy (STM), the long-range electrostatic force involved in scanning MIM reduces the stringent requirements for proximal probes, enabling high-speed, non-contact, and nondestructive measurements [13][14][15][16]. Due to the aforementioned advantages, the MIM achieves near-field measurements at nanoscale and has great potential in future application of high-resolution microwave images generation.…”

Section: Introductionmentioning

confidence: 99%

Developments and Recent Progresses in Microwave Impedance Microscope

et al. 2020

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Microwave impedance microscope (MIM) is a near-field microwave technology which has low emission energy and can detect samples without any damages. It has numerous advantages, which can appreciably suppress the common-mode signal as the sensing probe separates from the excitation electrode, and it is an effective device to represent electrical properties with high spatial resolution. This article reviews the major theories of MIM in detail which involve basic principles and instrument configuration. Besides, this paper summarizes the improvement of MIM properties, and its cutting-edge applications in quantitative measurements of nanoscale permittivity and conductivity, capacitance variation, and electronic inhomogeneity. The relevant implementations in recent literature and prospects of MIM based on the current requirements are discussed. Limitations and advantages of MIM are also highlighted and surveyed to raise awareness for more research into the existing near-field microwave microscopy. This review on the ongoing progress and future perspectives of MIM technology aims to provide a reference for the electronic and microwave measurement community.

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Superconducting material diagnostics using a scanning near-field microwave microscope

Cited by 17 publications

References 15 publications

High-frequency near-field microscopy

High-frequency near-field microscopy

Quantitative imaging of dielectric permittivity and tunability with a near-field scanning microwave microscope

Developments and Recent Progresses in Microwave Impedance Microscope

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