The discovery of high Tc superconductors has revealed promising applications in optoelectronics. However a basic requirement for the development of successful novel optronic devices is the ability to fabricate high quality Josephson, tunnel or three terminal devices in a reproducible, controllable and reliable way.Large area deposition of YBCO multilayers, whole wafer processing techniques are essential and in great progress. Nevertheless, the degradation of the YBa2Cu3O7-x surface layer close to the junction contacts is observed and induces severe limitations in the devices performances. Experimental evidence of such problems and possible solutions will be presented.Whe also try to analyze some of the characteristic behaviors and defects of experimental junctions made on YBCO based multilayers. 0-8194-0728-3/92/$4.O0