2020
DOI: 10.1016/j.surfcoat.2020.126207
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Super-hard and tough Ta1-xWxCy films deposited by magnetron sputtering

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Cited by 17 publications
(2 citation statements)
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“…The increase in the target power radial cracks can be observed at 8 kW and part of the coating edge fell off at 10 kW; the adhesion strength was assessed as HF2 at 8 kW and 10 kW. The enhancement of coating adhesion and cohesion is mainly determined by the increase in coating H, H/E*, and H 3 /E* 2 [29]. The increase in adhesion and cohesion indicates the improved cooperative deformation between coating and softer matrix [34].…”
Section: Mechanical Properties and Adhesionmentioning
confidence: 99%
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“…The increase in the target power radial cracks can be observed at 8 kW and part of the coating edge fell off at 10 kW; the adhesion strength was assessed as HF2 at 8 kW and 10 kW. The enhancement of coating adhesion and cohesion is mainly determined by the increase in coating H, H/E*, and H 3 /E* 2 [29]. The increase in adhesion and cohesion indicates the improved cooperative deformation between coating and softer matrix [34].…”
Section: Mechanical Properties and Adhesionmentioning
confidence: 99%
“…As the target power increases to 6.5 kW, the supply of atoms necessary for the growth of the TiN coating is optimized, leading to good film-substrate adhesion and film density (see Figures 3 and 6). However, further increasing the target power to 8 kW and 10 kW increases the tensile stress within the coating, due to the higher energy and number of sputtered atoms, which reduces the fracture toughness [29].…”
Section: Mechanical Properties and Adhesionmentioning
confidence: 99%