2014
DOI: 10.1007/s11664-013-2971-7
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Suitable Thicknesses of Base Metal and Interlayer, and Evolution of Phases for Ag/Sn/Ag Transient liquid-phase Joints Used for Power Die Attachment

Abstract: Real Si insulated gate bipolar transistors with conventional Ni/Ag metallization and dummy Si chips with thickened Ni/Ag metallization have both been bonded, at 250°C for 0 min, 40 min, and 640 min, to Ag foil electroplated with 2.7 lm and 6.8 lm thick Sn as an interlayer. On the basis of characterization of the microstructure of the resulting joints, suitable thicknesses are suggested for the Ag base metal and the Sn interlayer for Ag/Sn/Ag transient liquid-phase (TLP) joints used for power die attachment. Th… Show more

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Cited by 25 publications
(8 citation statements)
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References 27 publications
(33 reference statements)
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“…A concern on SLID joints is the intermetallic compound (IMC) region formed when the molten phase is consumed during bonding. Although the mechanical properties of IMC joints can be improved through post-heat treatments [7,8], the formation of pores is an issue. Ga and In had also been used in SLID designs due to its low melting temperature.…”
Section: Introductionmentioning
confidence: 99%
“…A concern on SLID joints is the intermetallic compound (IMC) region formed when the molten phase is consumed during bonding. Although the mechanical properties of IMC joints can be improved through post-heat treatments [7,8], the formation of pores is an issue. Ga and In had also been used in SLID designs due to its low melting temperature.…”
Section: Introductionmentioning
confidence: 99%
“…Effort has also been devoted to characterization of TLP bonded chips to metallic substrate materials when a high mismatch between the coefficients of thermal expansion (CTE) strongly affects the microstructural, [24][25][26] mechanical, [27][28][29] or electrical properties 30 after processing, annealing, or thermal cycling.…”
Section: Introductionmentioning
confidence: 99%
“…This result could indicate that Ag was not completely consumed during the reactive alloying even after being stored for over three months. Such surface morphological characterization together with the resistance stability tests indicate that LM-LAg-SBS has a [39,40] with the precipitation of Ga particles. The broad peak centered at ≈34.3° comes from Ga (PDF# 27 0222), while the peaks located at 38.4°, 55.5°, 65.1°, 69.6°, 78.2° very closely indicate as-formed In 4 Ag 9 (PDF# 29 0678).…”
Section: Resultsmentioning
confidence: 87%
“…The inset picture schematically illustrated the reacting wetting process. Once contacting LAg-SBS, LM can alloy with Ag and form LM-lyophilic intermetallic compounds[39,40] with the precipitation of Ga particles. The broad peak centered at ≈34.3° comes from Ga (PDF# 27 0222), while the peaks located at 38.4°, 55.5°, 65.1°, 69.6°, 78.2° very closely indicate as-formed In 4 Ag 9 (PDF# 29 0678).…”
mentioning
confidence: 99%