Subtractive photonics

Fatemi, Reza; Ives, Craig; Khachaturian, Aroutin; Hajimiri, Ali

doi:10.1364/oe.410139

Cited by 10 publications

(7 citation statements)

References 33 publications

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“…Currently, cost, complexity, and availability of these fabrication methods limit the exploration of multilayer photonic devices in academic and prototype settings. Advances in accessible multilayer fabrication is a worthwhile endeavor to unlock a broad spectrum of imaging applications 54 . Beyond replacing traditional absorptive-based Bayer filters with color routing structures, optimized devices targeting structural color will impact reflective display technology 55 and efficient, spectrally-selective waveguide couplers will improve performance of augmented reality displays 56 .…”

Section: Discussionmentioning

confidence: 99%

3D-patterned inverse-designed mid-infrared metaoptics

et al. 2023

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Modern imaging systems can be enhanced in efficiency, compactness, and application through the introduction of multilayer nanopatterned structures for manipulation of light based on its fundamental properties. High transmission multispectral imaging is elusive due to the commonplace use of filter arrays which discard most of the incident light. Further, given the challenges of miniaturizing optical systems, most cameras do not leverage the wealth of information in polarization and spatial degrees of freedom. Optical metamaterials can respond to these electromagnetic properties but have been explored primarily in single-layer geometries, limiting their performance and multifunctional capacity. Here we use advanced two-photon lithography to realize multilayer scattering structures that achieve highly nontrivial optical transformations intended to process light just before it reaches a focal plane array. Computationally optimized multispectral and polarimetric sorting devices are fabricated with submicron feature sizes and experimentally validated in the mid-infrared. A final structure shown in simulation redirects light based on its angular momentum. These devices demonstrate that with precise 3-dimensional nanopatterning, one can directly modify the scattering properties of a sensor array to create advanced imaging systems.

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Section: Discussionmentioning

confidence: 99%

3D-patterned inverse-designed mid-infrared metaoptics

et al. 2023

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“…Currently, cost, complexity, and availability of these fabrication methods limit the exploration of multilayer photonic devices in academic and prototype settings. Advances in accessible multilayer fabrication is a worthwhile endeavor to unlock a broad spectrum of imaging applications [48]. Beyond replacing traditional absorptive-based Bayer filters with color routing structures, optimized devices targeting structural color will impact reflective display technology [49] and efficient, spectrally-selective waveguide couplers will improve performance of augmented reality displays [50].…”

Section: Mainmentioning

confidence: 99%

3D-Patterned Inverse-Designed Mid-Infrared Metaoptics

Roberts¹,

Ballew²,

Zheng³

et al. 2022

Preprint

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“…The method of subtractive photonics requires patterning the metal and glass in the BEOL of an electronics chip such that suspended dielectric waveguides are formed when the metal is etched away [15], [16], as shown in Fig. 2 and described in Appendix A.…”

Section: Introductionmentioning

confidence: 99%

Subtractive Photonics in Bulk CMOS

Ives,

Sarkar,

Hajimiri

2023

IEEE J. Solid-State Circuits

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Subtractive photonics is presented as a method for implementing photonic waveguides into any bulk CMOS or electronics process. Metal and glass are patterned in the backend layers by the foundry to reveal suspended dielectric waveguides when the metal is etched away. This method requires a simple wet etch and provides waveguiding of light up to the visible regime using the broad transparency windows of silicon oxides. Mechanical, chemical, and photonic considerations are discussed, and photonic design is extensively detailed in the context of a 180-nm CMOS process. Example waveguides are constructed and measured, with losses as low as 4.1 dB/cm for a multimode waveguide at 1550 nm. In addition, waveguides are measured in the visible range, waveguide-photodiode couplers are detailed, and electronic-photonic systems are demonstrated to be unaffected by the etching.

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Subtractive photonics

Cited by 10 publications

References 33 publications

3D-patterned inverse-designed mid-infrared metaoptics

3D-patterned inverse-designed mid-infrared metaoptics

3D-Patterned Inverse-Designed Mid-Infrared Metaoptics

Subtractive Photonics in Bulk CMOS

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