Substrates effect on Zn1−xMnxO thin films grown by RF magnetron sputtering

Elanchezhiyan, J.; Bhuvana, K.P.; Gopalakrishnan, N.; Balasubramanian, T.

doi:10.1016/j.jallcom.2007.09.112

Cited by 14 publications

(8 citation statements)

References 22 publications

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“…For most of the thin films growth, the lattice mismatch and the thermal expansion coefficient mismatch between the films and substrate materials cause significant microstructural strain in films. As a result, the properties of thin films can be quite different from the corresponding bulk crystalline materials [13].…”

Section: Resultsmentioning

confidence: 99%

Influence of substrate metals on the crystal growth of AlN films

Xiong

et al. 2010

Int J Miner Metall Mater

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AlN films were deposited by reactive radio frequency (RF) sputtering on various bottom electrodes, such as Al, Ti, Mo, Au/Ti, and Pt/Ti. The effects of substrate metals on the orientation of AlN thin films were investigated. The results of X-ray diffraction, atomic force microscopy, and field emission scanning electron microscopy show that the orientation of AlN films depends on the kinds of substrate metals evidently. The differences of AlN films deposited on various metal electrodes are attributed to the differences in lattice mismatch and thermal expansion coefficient between the AlN material and substrate metals. The AlN film deposited on the Pt/Ti electrode reveals highly the c-axis orientation with well-textured columnar structure. The positive role of the Pt/Ti electrode in achieving the high-quality AlN films and high-performance film bulk acoustic resonator (FBAR) may be attributed to the smaller lattice mismatch as well as the similarity of thermal expansion coefficient between the deposited AlN material and the Pt/Ti electrode substrate.

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Section: Resultsmentioning

confidence: 99%

Influence of substrate metals on the crystal growth of AlN films

Xiong

et al. 2010

Int J Miner Metall Mater

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“…However, there are some experimental works reported on ZnO:Mn with various morphologies, such as bulk [9], thin films [10] and nanoparticles [11] where the magnetism is very sensitive to preparation conditions such as synthesis method, doping content, sintering temperature and annealing environment. For example, Zn 0.99 Mn 0.01 O bulk samples prepared by a standard solid-state reaction method exhibited room-temperature ferromagnetism when sintered at a temperature of 500 °C; however, the samples sintered at a higher temperature of 900 °C displayed a linear response, showing a paramagnetic behavior [12].…”

Section: Introductionmentioning

confidence: 99%

Defect-mediated ferromagnetism in ZnO:Mn nanorods

et al. 2013

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In this work, the structural, chemical and magnetic properties of ZnO:Mn nanorods were investigated. Firstly, well-aligned ZnO nanorods with their long axis parallel to the crystalline c-axis were successfully grown by the vapor phase transport technique on Si substrates coated with a ZnO buffer layer. Mn metal was then diffused into these nanorods at different temperatures in vacuum. From SEM results, ZnO:Mn nanorods were observed to have diameters of ~100 nm and lengths of 4 µm. XPS analysis showed that the Mn dopant substituted into the ZnO matrix with a valence state of +2. Magnetic measurements performed at room temperature revealed that undoped ZnO nanorods exhibit ferromagnetic behavior which may be related to oxygen vacancy defect-mediated d 0 ferromagnetism. ZnO:Mn samples were seen to show an excess room temperature ferromagnetism that is attributed to the presence of oxygen vacancy defects forming bound magnetic polarons involving Mn.

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“…However, a number of experimental studies reveal that the magnetic behavior of Mn in ZnO appear to be dependent on preparation conditions, such as preparation methods, doping concentration, substrate type, substrate temperature and annealing atmosphere. For example, Elanchezhiyan et al observed ferromagnetic behavior for films grown on sapphire substrates while films on Si substrates exhibited only paramagnetic behavior [10].…”

Section: Introductionmentioning

confidence: 99%

Structural, optical and magnetic properties of Zn1−xMnxO micro-rod arrays synthesized by spray pyrolysis method

et al. 2012

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Undoped and Mn-doped ZnO micro-rod arrays were fabricated by the spray pyrolysis method on glass substrates. X-ray diffraction and scanning electron microscopy showed that these micro-rod arrays had a polycrystalline wurtzite structure and high c-axis preferred orientation.Photoluminescence studies at 10 K show that the increase of manganese content leads to a relative decrease in deep level band intensity with respect to undoped ZnO. Magnetic measurements indicated that undoped ZnO was diamagnetic in nature whereas Mn-doped ZnO samples exhibited ferromagnetic behavior at room temperature, which is possibly related to the substitution of Mn ions (Mn 2+ ) for Zn ions in the ZnO lattice.

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Substrates effect on Zn1−xMnxO thin films grown by RF magnetron sputtering

Cited by 14 publications

References 22 publications

Influence of substrate metals on the crystal growth of AlN films

Influence of substrate metals on the crystal growth of AlN films

Defect-mediated ferromagnetism in ZnO:Mn nanorods

Structural, optical and magnetic properties of Zn1−xMnxO micro-rod arrays synthesized by spray pyrolysis method

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