Substrate temperature estimation and control in advanced MOCVD process for superconductor manufacturing

Chebbi, Amal; Grigoriadis, Karolos; Franchek, Matthew; Cescon, Marzia

doi:10.1007/s00170-024-13699-1

Int J Adv Manuf Technol

2024

DOI: 10.1007/s00170-024-13699-1

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Substrate temperature estimation and control in advanced MOCVD process for superconductor manufacturing

Amal Chebbi,

Karolos Grigoriadis,

Matthew Franchek

et al.

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Substrate temperature estimation and control in advanced MOCVD process for superconductor manufacturing

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References 24 publications

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