“…On the other hand, the LVth cell can increase the failure tolerance more than that for HVth in the range of a higher z-score, because lowering Vth with a lower dopant concentration leads to smaller σVth, resulting in a smaller variation of SNM (σSNM). The σVth is expressed as equation (2), where φ bi is the Fermi level, V bs is the body bias, ε Si is the dielectric constant of silicon, ε ox is the dielectric constant of oxide, q is the unit charge, Na is the doping concentration, Tox is the oxide thickness of MOSFET and Leff and Weff are the length and width of the transistor, respectively [2]. (2) The σVth can be reduced by lowering the Na [3].…”