Optical Interference Coatings Conference (OIC) 2022 2022
DOI: 10.1364/oic.2022.md.5
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Substrate-free Miniaturized Coarse Wavelength Division Multiplexing Filters

Abstract: To unlock the benefits of thin-film filters, produced by means of ion beam sputtering, for compact, hybrid integrated optical systems, we have implemented a sacrificial-substrate approach to create high-precision, miniaturized, substrate-free filters.

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“…Acknowledgment. Portions of this work were presented at the Optical Interference Coatings Conference in 2022, paper MD.5 [24]. The authors thank the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for funding this work under Germany's Excellence Strategy within the Cluster of Excellence PhoenixD.…”
mentioning
confidence: 99%
“…Acknowledgment. Portions of this work were presented at the Optical Interference Coatings Conference in 2022, paper MD.5 [24]. The authors thank the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for funding this work under Germany's Excellence Strategy within the Cluster of Excellence PhoenixD.…”
mentioning
confidence: 99%