Substrate Engineering for CVD Growth of Single Crystal Graphene

Huang, Ming; Deng, Bangwei; Dong, Fan; Zhang, Lili; Zhang, Zheye; Chen, Peng

doi:10.1002/smtd.202001213

Cited by 28 publications

(24 citation statements)

References 199 publications

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“…More specifically, top‐down methods mainly include micromechanical exfoliation and liquid phase exfoliation methods, [ 15,33–42 ] while bottom‐up methods generally include chemical vapor deposition (CVD) and hydrothermal/solvothermal methods. [ 43–53 ]…”

Section: Synthesis and Optoelectronic Properties Of 2d Materials And ...mentioning

confidence: 99%

Perspectives of 2D Materials for Optoelectronic Integration

Zhao

Zhang

et al. 2021

Adv Funct Materials

100

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2D materials show wide-ranging physical properties with their electronic bandgaps varying from zero to several electronvolts, offering a rich platform to explore novel electronic and optoelectronic functions. Notably, atomically thin 2D materials are well suited for integration in optoelectronic circuits, because of their ultrathin body, strong light-matter interactions, and compatibility with the current silicon photonic technology. In this paper, an overview of the state of the art of using 2D materials in optoelectronic devices and integration is provided. The optoelectronic properties of 2D materials and their typical electronic and optoelectronic applications including light sources, optical modulators, photodetectors, field-effect transistors, and logic circuits are summarized. The device configurations, operation mechanisms, and device figures-of-merit are introduced and discussed. By discussing the recent advances, future trends, and existing challenges of 2D materials and their optoelectronic devices, this review has provided an insight into the perspectives of 2D materials for optoelectronic integration and may guide the development of this field within the research community.

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Section: Synthesis and Optoelectronic Properties Of 2d Materials And ...mentioning

confidence: 99%

Perspectives of 2D Materials for Optoelectronic Integration

Zhao

Zhang

et al. 2021

Adv Funct Materials

100

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“…Mass production schemes discussed in this section includes graphene transfer process using roll-to-roll (R2R) processing, graphene growth and MEMS device fabrication on transition metal thin films for transfer-free process, controlled graphene growth on single-crystalline films, strain engineering on the substrate, and other approaches. [183][184][185]. Two data points with asterisks represent CVD growth of graphene by accelerated growth technique [186,187].…”

Section: Proposed Solutionsmentioning

confidence: 99%

“…Also, grain boundaries of transition metal film act as a nucleation site which may lead to the growth of additional patches of graphene. As a result, it is important to minimize transition metal's grain boundaries to successfully control the uniformity of graphene [183].…”

Section: Low Temperature Growth Of Graphenementioning

confidence: 99%

“…Substrate engineering plays an crucial role in how these nucleation sites are controlled. Graphene growth on single crystalline transition metal, such as Ru (111), Ir (111), Pt (111), Co(0001), Ni (111), Cu (111), and Cu/Ni (111) alloy has also shown promise in producing single crystal graphene [183]. These transition metal substrates require extra annealing steps to form single crystalline structures.…”

Section: Substrate Engineering For Single-seed Growth For Single Crystal Graphene (Scg)mentioning

confidence: 99%

“…(a) Mobility by graphene growth time on different growth metal layer. (b) Grain sizes by graphene growth time on different growth metal layer[183][184][185]. Two data points with asterisks represent CVD growth of graphene by accelerated growth technique[186,187].…”

mentioning

confidence: 99%

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Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)

et al. 2021

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The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices.

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Morphology‐Control Growth of Graphene Islands by Nonlinear Carbon Supply

Samad

Schwingenschlögl

et al. 2022

Advanced Materials

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Controlling the morphology of graphene and other two-dimensional (2D) materials in chemical vapor deposition (CVD) growth is crucial because the morphology reflects the crystal quality of as-synthesized nanomaterials in a certain way, and consequently it indirectly represents the physical properties of 2D materials such as band gap, selective ion transportation, and impermeability. However, precise control of the morphology is limited by the complex formation mechanism and sensitive growth-environment factors of graphene. Therefore, the CVD synthesis of single-crystal hexagonal-shaped graphene islands with specific sizes is challenging. Herein, an unconventional nonlinear carbon supply growth strategy is proposed to realize controllable CVD growth of desired hexagonal graphene islands with specific sizes on Cu substrates. Large-area graphene films of isolated islands with desired densities, sizes, and distances between the islands were successfully synthesized. Subsequently, the direct growth of a planar-tunnel-junction structure based on two parallel gapped graphene islands was achieved by specific adjustment of the growth and etching processes of graphene CVD synthesis. We therefore demonstrated that the nonlinear carbon supply growth strategy is a reliable method for the synthesis of high-quality graphene and can facilitate the direct growth of graphene-based nanodevices in the future.

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Substrate Engineering for CVD Growth of Single Crystal Graphene

Cited by 28 publications

References 199 publications

Perspectives of 2D Materials for Optoelectronic Integration

Perspectives of 2D Materials for Optoelectronic Integration

Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)

Morphology‐Control Growth of Graphene Islands by Nonlinear Carbon Supply

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