2015
DOI: 10.1016/j.apsusc.2015.09.066
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Substrate effect of laser surface sub-micro patterning by means of self-assembly SiO2 microsphere array

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Cited by 11 publications
(2 citation statements)
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“…A natural extension is that arbitrary periodic nanostructures with optimized topography can be utilized to create 3D patterns in photoresists. [222][223][224][225][226] Although the self-assembly method makes it possible to pattern over a large area, it is primarily used to fabricate nanoholes. Offaxis irradiation can be combined with the self-assembly method to fabricate arbitrary structure patterns.…”
Section: Deep-subwavelength Fwhm and Neareld Effect Of Pnjsmentioning
confidence: 99%
“…A natural extension is that arbitrary periodic nanostructures with optimized topography can be utilized to create 3D patterns in photoresists. [222][223][224][225][226] Although the self-assembly method makes it possible to pattern over a large area, it is primarily used to fabricate nanoholes. Offaxis irradiation can be combined with the self-assembly method to fabricate arbitrary structure patterns.…”
Section: Deep-subwavelength Fwhm and Neareld Effect Of Pnjsmentioning
confidence: 99%
“…The surface morphology can be affect by different diameter sphere with different wavelength and different laser fluences [9][10]. Recently, it was reported that the substrate materials with diverse refractive indices played a role on the optical field modulation [11]. For the fabrication on nanostructures by optical focusing, the focusing media with nanometer scale was essential, but it is difficult to fabricated.…”
Section: Introductionmentioning
confidence: 99%